Patents by Inventor Stefan VITZTHUM

Stefan VITZTHUM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate holder reception apparatus
    Patent number: 10260161
    Abstract: This invention concerns a substrate holder reception apparatus (1) for clamping a substrate holder (11) in a substrate holder clamping direction (SHCD) in a predetermined position of the substrate holder (11) and releasing the substrate holder (11), comprising at least one substrate holder connection device (21) for mechanical aligning and electrically contacting of the substrate holder (11), wherein the substrate holder connection device (21) comprises a separate substrate holder alignment device (211) for aligning the substrate holder (11) with the substrate holder connection device (21) in an alignment direction, and a separate substrate holder contact device (212) for electrically contacting the substrate holder (11). Further, the invention concerns an electrochemical treatment apparatus (5) comprising the substrate holder reception apparatus (1).
    Type: Grant
    Filed: August 4, 2016
    Date of Patent: April 16, 2019
    Assignee: Atotech Deutschland GmbH
    Inventors: Ralph Rauenbusch, Tobias Bussenius, Stefan Vitzthum
  • SUBSTRATE HOLDER RECEPTION APPARATUS
    Publication number: 20180347064
    Abstract: This invention concerns a substrate holder reception apparatus (1) for clamping a substrate holder (11) in a substrate holder clamping direction (SHCD) in a predetermined position of the substrate holder (11) and releasing the substrate holder (11), comprising at least one substrate holder connection device (21) for mechanical aligning and electrically contacting of the substrate holder (11), wherein the substrate holder connection device (21) comprises a separate substrate holder alignment device (211) for aligning the substrate holder (11) with the substrate holder connection device (21) in an alignment direction, and a separate substrate holder contact device (212) for electrically contacting the substrate holder (11). Further, the invention concerns an electrochemical treatment apparatus (5) comprising the substrate holder reception apparatus (1).
    Type: Application
    Filed: August 4, 2016
    Publication date: December 6, 2018
    Inventors: Ralph RAUENBUSCH, Tobias BUSSENIUS, Stefan VITZTHUM