Abstract: A method of operating a multi-beam particle beam system includes: generating a multiplicity of particle beams such that they each pass through multipole elements that are either intact or defective; focusing the particle beams in a predetermined plane; determining excitations for the deflection elements of the multipole elements; exciting the deflection elements of the multipole elements that are intact with the determined excitations; modifying the determined excitations for the deflection elements of the multipole elements that are defective; and exciting the deflection elements of the defective multipole elements with the modified excitations. Modifying the determined excitations includes adding corrective excitations to the determined excitations. The corrective excitations are the same for all deflection elements of the defective multipole element.

Abstract: A system for generating fabricated pattern data records (XDRs) based on data from accessible data sources, which comprises an XDR core module containing one or more modeling and pattern creation modules for modeling original data received from the data sources; one or more synthetic data generation modules for generating fabricated data, based on the patterns created by the modeling and pattern creation modules; a data splitting module for splitting the data into training and testing sets according to a predetermined policy; an XDR storage database for storing created patterns and fabricated data; a configuration manager for controlling the operation of the modeling and pattern creation modules and of the synthetic data generation modules; a plurality of XDR agents being software components for communicating with the data sources and accessing relevant data, using a unique API of each data source.