Abstract: A device for testing a pressure sensor having a pressure-sensitive region includes a fixture for a pressure sensor designed to receive the pressure sensor, a nozzle designed to generate a gas flow interacting with the pressure-sensitive region of the pressure sensor and positioned so close to the fixture such that the nozzle does not contact the pressure-sensitive region of the pressure sensor and a predefined portion of the pressure-sensitive region experiences an increased or decreased pressure relative to ambient pressure which is constant within a deviation of 10% relative to a pressure mean value, and a measurer designed to measure an electrical signal received by the pressure sensor.

Abstract: A device for testing a pressure sensor having a pressure-sensitive region includes a fixture for a pressure sensor designed to receive the pressure sensor, a nozzle designed to generate a gas flow interacting with the pressure-sensitive region of the pressure sensor and positioned so close to the fixture such that the nozzle does not contact the pressure-sensitive region of the pressure sensor and a predefined portion of the pressure-sensitive region experiences an increased or decreased pressure relative to ambient pressure which is constant within a deviation of 10% relative to a pressure mean value, and a measurer designed to measure an electrical signal received by the pressure sensor.

Abstract: For especially simple and reliable handling of thin and/or bent semiconductor wafers it is proposed in a corresponding holding means (100) that there is a gas flowing through at least one first means (5) for producing the forces which pull a semiconductor wafer toward the means (100) based on the Bernoulli principle and that there is at least one second means (2, 3) for holding the semiconductor wafer on the means (100) as a result of the forces produced by at least one electromagnetic field.