Patents by Inventor Stefano Felici
Stefano Felici has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11953522Abstract: A probe head for a testing apparatus integrated on a semiconductor wafer is disclosed having a first plurality of contact probes having a first transversal diameter, a second plurality of micro contact probes having a second transversal diameter, smaller than the first transversal diameter, and a flexible membrane having conductive tracks for connecting a first plurality contact probe with a corresponding second plurality micro contact probe. The second plurality contact probes are arranged between the testing apparatus and the flexible membrane, and the second plurality micro contact probes are arranged between the flexible membrane and a semiconductor wafer.Type: GrantFiled: December 17, 2020Date of Patent: April 9, 2024Assignee: TECHNOPROBE S.P.A.Inventors: Roberto Crippa, Stefano Felici
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Publication number: 20240094252Abstract: Dual shield probes are provided having one or more of a plurality of different features including: discontinuous dielectric spacers, fixed nodes, sliding nodes, shield nodes, bridges, stops, interlocked dielectric and conductive elements, along with methods of using and making such probes.Type: ApplicationFiled: October 4, 2021Publication date: March 21, 2024Applicant: Microfabrica Inc.Inventors: Jia Li, Arun S. Veeramani, Stefano Felici, Dennis R. Smalley
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Publication number: 20240019463Abstract: Forming buckling beam probe arrays having MEMS probes engaged with guide plates during formation or after formation of the probes while the probes are held in the array configuration in which they were formed is disclosed. Probes can be formed in, or laterally aligned with, guide plate through holes. Guide plate engagement can occur by longitudinally locating guide plates on probes that are partially formed or fully formed with exposed ends, by forming probes within guide plate through holes, by forming guide plates around probes, or forming guide plates in lateral alignment with arrayed probes and then longitudinally engaging the probes and the through holes of the guide plates. Arrays can include probes and a substrate to which the probes are bonded with one or more guide plates. Final arrays can include probes held by guide plates with aligned or laterally shifted hole patterns.Type: ApplicationFiled: September 18, 2023Publication date: January 18, 2024Inventors: MIchael S. Lockard, Stefano Felici, Uri Frodis, Dennis R. Smalley
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Patent number: 11867723Abstract: A probe head for testing a device under test integrated on a semiconductor wafer includes a plurality of contact probes, each having a first end and a second end, and at least one first lower guide and one second lower guide at the first end. The guides are parallel to each other and have a respective plurality of first and second guide holes for slidingly housing the contact probes. At least one third lower guide is substantially parallel to the first lower guide and to the second lower guide and includes a plurality of third guide holes for slidingly housing the contact probes. The guide holes are disposed in a shifted arrangement to eliminate a scrub movement of the first ends of each contact probe of the probe head.Type: GrantFiled: June 24, 2021Date of Patent: January 9, 2024Assignee: Technoprobe S.p.A.Inventor: Stefano Felici
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Patent number: 11821918Abstract: Embodiments are directed to the formation of buckling beam probe arrays having MEMS probes that are engaged with guide plates during formation or after formation of the probes while the probes are held in the array configuration in which they were formed. In other embodiments, probes may be formed in, or laterally aligned with, guide plate through holes. Guide plate engagement may occur by longitudinally locating guide plates on probes that are partially formed or fully formed with exposed ends, by forming probes within guide plate through holes, by forming guide plates around probes, or forming guide plates in lateral alignment with arrayed probes and then longitudinally engaging the probes and the through holes of the guide plates. Final arrays may include probes and a substrate to which the probes are bonded along with one or more guide plates while in other embodiments final arrays may include probes held by a plurality of guide plates (e.g.Type: GrantFiled: April 26, 2021Date of Patent: November 21, 2023Assignee: MICROFABRICA INC.Inventors: Michael S. Lockard, Stefano Felici, Uri Frodis, Dennis R. Smalley
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Publication number: 20230288447Abstract: A contact probe for a probe head for test equipment of electronic devices is provided. The contact probe includes a first end portion and a second end portion configured to realize a contact with suitable contact structures, and a body portion extended along a longitudinal development axis between respective the first and second end portions. The first end portion includes a base portion, a peripherally protruding element protruding from the base portion, and a hollow part having a base at a surface of the base portion and being surrounded by the peripherally protruding element. In addition, the peripherally protruding element is configured to penetrate into the contact structures.Type: ApplicationFiled: July 8, 2021Publication date: September 14, 2023Applicant: TECHNOPROBE S.P.A.Inventors: Stefano FELICI, Fabio MORGANA, Roberto CRIPPA
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Publication number: 20230021227Abstract: A probe head for a testing apparatus integrated on a semiconductor wafer is disclosed having a first plurality of contact probes having a first transversal diameter, a second plurality of micro contact probes having a second transversal diameter, smaller than the first transversal diameter, and a flexible membrane having conductive tracks for connecting a first plurality contact probe with a corresponding second plurality micro contact probe. The second plurality contact probes are arranged between the testing apparatus and the flexible membrane, and the second plurality micro contact probes are arranged between the flexible membrane and a semiconductor wafer.Type: ApplicationFiled: December 17, 2020Publication date: January 19, 2023Applicant: TECHNOPROBE S.P.A.Inventors: Roberto CRIPPA, Stefano FELICI
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Publication number: 20210318355Abstract: A probe head for testing a device under test integrated on a semiconductor wafer includes a plurality of contact probes, each having a first end and a second end, and at least one first lower guide and one second lower guide at the first end. The guides are parallel to each other and have a respective plurality of first and second guide holes for slidingly housing the contact probes. At least one third lower guide is substantially parallel to the first lower guide and to the second lower guide and includes a plurality of third guide holes for slidingly housing the contact probes. The guide holes are disposed in a shifted arrangement to eliminate a scrub movement of the first ends of each contact probe of the probe head.Type: ApplicationFiled: June 24, 2021Publication date: October 14, 2021Inventor: Stefano FELICI
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Patent number: 11112431Abstract: A probe card of a testing apparatus of electronic devices comprises a testing head, which houses a plurality of contact elements extending along a longitudinal axis between a first end portion and a second end portion, a support plate, onto which the first end portion is adapted to abut, and a flexible membrane. Suitably, the testing head is arranged between the support plate and a first portion of the flexible membrane, which is connected to the support plate through a second portion thereof, the probe card further comprising a plurality of contact tips arranged on a first face of the flexible membrane at the first portion thereof, the second end portion of each contact element being apt to abut onto a second face of the flexible membrane, opposite to the first face, the number and distribution of the contact elements being different to the number and distribution of the contact tips.Type: GrantFiled: August 12, 2019Date of Patent: September 7, 2021Assignee: TECHNOPROBE S.P.A.Inventor: Stefano Felici
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Publication number: 20210255218Abstract: A probe head for testing a device under test includes an upper guide and a lower guide parallel to each other and spaced apart. Each of the guides is provided with a respective plurality of guide holes, a plurality of contact probes housed in the guide holes and provided each with a first end and with a second end, the first end being adapted to contact pads of a device under test. At least one additional guide is associated with one of the guides. The additional guide includes first guide holes, housing a first group of the contact probes, and second guide holes, housing a second group of the contact probes. The first and second guide holes are shifted with respect to the guide holes of the guide which said additional guide is associated with, and the shift of the first guide holes is in a direction opposite the shift of the second guide holes.Type: ApplicationFiled: May 5, 2021Publication date: August 19, 2021Inventor: Stefano FELICI
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Patent number: 11029336Abstract: A probe card for a testing apparatus of electronic devices comprises a testing head, which houses a plurality of contact elements extending along a longitudinal axis (H-H) between a first end portion and a second end portion, a support plate, onto which the first end portion is adapted to abut, and a flexible membrane which comprises a first face and a second and opposite face.Type: GrantFiled: August 12, 2019Date of Patent: June 8, 2021Assignee: TECHNOPROBE S.P.A.Inventors: Riccardo Vettori, Stefano Felici
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Patent number: 10782319Abstract: A probe card for testing of electronic devices comprises a testing head with plural contact probes inserted into guide holes of an upper guide and a lower guide, and a space transformer, each of the contact probes having a first terminal portion projecting from the lower guide with a first length and ending with a contact tip adapted to abut onto a respective contact pad of a device to be tested, and a second terminal portion projecting from the upper guide with a second length and ending with a contact head adapted to abut onto a contact pad of the space transformer. The probe card comprises a spacer element interposed between the space transformer and the upper guide and removable to adjust the first length of the first terminal portion by changing the second length of the second terminal portion and approaching the upper guide and the space transformer.Type: GrantFiled: December 13, 2018Date of Patent: September 22, 2020Assignee: TECHNOPROBE S.P.A.Inventors: Roberto Crippa, Stefano Felici
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Publication number: 20190361051Abstract: A probe card for a testing apparatus of electronic devices comprises a testing head, which houses a plurality of contact elements extending along a longitudinal axis (H-H) between a first end portion and a second end portion, a support plate, onto which the first end portion is adapted to abut, and a flexible membrane which comprises a first face and a second and opposite face.Type: ApplicationFiled: August 12, 2019Publication date: November 28, 2019Inventors: Riccardo VETTORI, Stefano FELICI
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Publication number: 20190361050Abstract: A probe card of a testing apparatus of electronic devices comprises a testing head, which houses a plurality of contact elements extending along a longitudinal axis between a first end portion and a second end portion, a support plate, onto which the first end portion is adapted to abut, and a flexible membrane. Suitably, the testing head is arranged between the support plate and a first portion of the flexible membrane, which is connected to the support plate through a second portion thereof, the probe card further comprising a plurality of contact tips arranged on a first face of the flexible membrane at the first portion thereof, the second end portion of each contact element being apt to abut onto a second face of the flexible membrane, opposite to the first face, the number and distribution of the contact elements being different to the number and distribution of the contact tips.Type: ApplicationFiled: August 12, 2019Publication date: November 28, 2019Inventor: STEFANO FELICI
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Publication number: 20190113539Abstract: A probe card for testing of electronic devices comprises a testing head with plural contact probes inserted into guide holes of an upper guide and a lower guide, and a space transformer, each of the contact probes having a first terminal portion projecting from the lower guide with a first length and ending with a contact tip adapted to abut onto a respective contact pad of a device to be tested, and a second terminal portion projecting from the upper guide with a second length and ending with a contact head adapted to abut onto a contact pad of the space transformer. The probe card comprises a spacer element interposed between the space transformer and the upper guide and removable to adjust the first length of the first terminal portion by changing the second length of the second terminal portion and approaching the upper guide and the space transformer.Type: ApplicationFiled: December 13, 2018Publication date: April 18, 2019Inventors: Roberto CRIPPA, Stefano FELICI
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Patent number: 9829508Abstract: It is described a testing head for a testing equipment of an electronic device comprising at least one upper guide and a lower guide provided with guide holes, a plurality of contact probes inserted into the guide holes of the upper and lower guides and at least one containment element of the probes being is disposed between the upper and lower guides, each of the contact probes having at least one terminal portion which ends with a contact tip adapted to abut on a respective contact pad of the electronic device to be tested; at least one spacer element sandwiched between the containment element and at least one of the upper and lower guides, the spacer element being removable to adjust a length of the terminal portions of the contact probes projecting from the lower guide.Type: GrantFiled: July 2, 2015Date of Patent: November 28, 2017Assignee: Technoprobe S.p.A.Inventors: Stefano Felici, Raffaele Vallauri, Roberto Crippa
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Publication number: 20150309076Abstract: It is described a testing head for a testing equipment of an electronic device comprising at least one upper guide and a lower guide provided with guide holes, a plurality of contact probes inserted into the guide holes of the upper and lower guides and at least one containment element of the probes being is disposed between the upper and lower guides, each of the contact probes having at least one terminal portion which ends with a contact tip adapted to abut on a respective contact pad of the electronic device to be tested; at least one spacer element sandwiched between the containment element and at least one of the upper and lower guides, the spacer element being removable to adjust a length of the terminal portions of the contact probes projecting from the lower guide.Type: ApplicationFiled: July 2, 2015Publication date: October 29, 2015Inventors: Stefano Felici, Raffaele Vallauri, Roberto Crippa
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Patent number: 7301354Abstract: A contact probe for a testing head is presented. The contact probe for a testing head has a plurality of these probes which are inserted in guide holes realized in respective dies, the probe comprising a rod-shaped body equipped at an end with at least a contact tip effective to ensure the mechanical and electrical contact with a corresponding contact pad of an integrated electronic device to be tested. The rod-shaped body has a nonuniform cross section.Type: GrantFiled: October 12, 2004Date of Patent: November 27, 2007Assignee: Technoprobe S.p.A.Inventors: Giuseppe Crippa, Stefano Felici
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Patent number: 7227368Abstract: A contact probe for a testing head effective to test a plurality of semiconductor-integrated electronic devices comprises a rod-like probe body having a cross section of prefixed contour and provided in correspondence with at least one end with an eccentric contact tip. The contact tip is positioned within the contour of the cross section of the probe body.Type: GrantFiled: March 24, 2005Date of Patent: June 5, 2007Assignee: Technoprobe S.p.A.Inventors: Giuseppe Crippa, Stefano Felici
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Publication number: 20050270044Abstract: A contact probe for a testing head effective to test a plurality of semiconductor-integrated electronic devices comprises a rod-like probe body having a cross section of prefixed contour and provided in correspondence with at least one end with an eccentric contact tip. The contact tip is positioned within the contour of the cross section of the probe body.Type: ApplicationFiled: March 24, 2005Publication date: December 8, 2005Applicant: Technoprobe S.p.A.Inventors: Giuseppe Crippa, Stefano Felici