Abstract: The invention relates to a cathodoluminescence detection system comprising: a collecting optic (112) collecting light radiation (108) from a sample illuminated by a beam of charged particles and reflecting said radiation (108) onto analysis means, said collecting optic (112) being placed in a chamber, called a vacuum chamber, wherein the pressure is below atmospheric pressure; and means (316) for adapting the light radiation, placed downstream of the collecting optic (112) and designed to adapt said light radiation (108) at the inlet of the analysis means. Said system is characterized in that all or part of the adapting means (316) is placed in an environment where the pressure is higher than the pressure in said vacuum chamber.

Abstract: A hybrid electron microscope includes: an electron source to emit an electron beam; a parabolic mirror including: a reflective surface; and an aperture to communicate the electron beam through the parabolic mirror; and a sample holder interposed between the electron source and the parabolic mirror such that the reflective surface of the parabolic mirror faces the electron source and the sample holder.

Abstract: A hybrid electron microscope includes: an electron source to emit an electron beam; a parabolic mirror including: a reflective surface; and an aperture to communicate the electron beam through the parabolic mirror; and a sample holder interposed between the electron source and the parabolic mirror such that the reflective surface of the parabolic mirror faces the electron source and the sample holder.

Abstract: A cathodoluminescence detection system is provided, including a source of charged particles arranged to illuminate a sample with a charged particle beam, and an optical path having at least two optical components capable of collecting and conveying light radiation coming from the illuminated sample to an analysis device; each optical component of the optical path is selected so that: the maximum output angle of the optical component is less than or equal to 120% of the maximum acceptance angle of the next optical component; and the diameter of the radiation coming from the optical component in the input plane of the next optical component is less than or equal to 120% of the useful input diameter of the next optical component.

Abstract: A cathodoluminescence detection system is provided, including a source of charged particles arranged to illuminate a sample with a charged particle beam, and an optical path having at least two optical components capable of collecting and conveying light radiation coming from the illuminated sample to an analysis device; each optical component of the optical path is selected so that: the maximum output angle of the optical component is less than or equal to 120% of the maximum acceptance angle of the next optical component; and the diameter of the radiation coming from the optical component in the input plane of the next optical component is less than or equal to 120% of the useful input diameter of the next optical component.

Abstract: A cathodoluminescence detection system is provided, including a collection optic collecting light radiation coming from a sample illuminated by a charged particle beam and sending the light radiation to an analyzer, a positioner for the collection optic; the positioner including several translation components of the collection optic. Each translation component effects the translation of the collection optic in one dimension of space so that the translation components effect the translation of the collection optic in several dimensions of space.

Abstract: The invention relates to a cathodoluminescence detection system comprising: a collecting optic (112) collecting light radiation (108) from a sample illuminated by a beam of charged particles and reflecting said radiation (108) onto analysis means, said collecting optic (112) being placed in a chamber, called a vacuum chamber, wherein the pressure is below atmospheric pressure; and means (316) for adapting the light radiation, placed downstream of the collecting optic (112) and designed to adapt said light radiation (108) at the inlet of the analysis means. Said system is characterized in that all or part of the adapting means (316) is placed in an environment where the pressure is higher than the pressure in said vacuum chamber.

Abstract: Cathodoluminescence detection system comprising a collecting optic (112), for collecting light radiation coming from a specimen illuminated by a beam of charged particles and reflecting said light radiation onto analysis means, characterized in that it comprises means (606,614-618) for positioning said collecting optic (112) along at least one dimension.