Abstract: A method for temperature compensation of a MEMS sensor. The method includes: in a balancing step, a temperature gradient is produced by a thermal element and a first and a second temperature are determined at a first and a second temperature measurement point, wherein a deflection of a movable structure produced by the temperature gradient is measured and a compensation value is ascertained dependent on the first and second temperature and the deflection; in a measurement step, a physical stimulus is measured by way of a deflection of the movable structure and a third and fourth temperature is determined at the first and second temperature measurement points; in a compensation step, a measured value of the physical stimulus is ascertained dependent on the measured deflection, the third and fourth temperature and the compensation value. A method is also provided including: a regulation step, and a measurement step.

Abstract: A method for temperature compensation of a MEMS sensor. The method includes: in a balancing step, a temperature gradient is produced by a thermal element and a first and a second temperature are determined at a first and a second temperature measurement point, wherein a deflection of a movable structure produced by the temperature gradient is measured and a compensation value is ascertained dependent on the first and second temperature and the deflection; in a measurement step, a physical stimulus is measured by way of a deflection of the movable structure and a third and fourth temperature is determined at the first and second temperature measurement points; in a compensation step, a measured value of the physical stimulus is ascertained dependent on the measured deflection, the third and fourth temperature and the compensation value. A method is also provided including: a regulation step, and a measurement step.

Abstract: In a metering apparatus for the metered introduction of a first medium into an exhaust gas system of an internal combustion engine, which includes a conditioning apparatus in which also a second medium is introduced via a dispensing apparatus which is connected to the conditioning apparatus and via which the first medium and the second medium are introduced into the exhaust gas system, a supply unit for supplying a third medium, which is different from the second medium in its physical properties and/or its chemical composition, is connected to the conditioning apparatus for cleaning of the conditioning apparatus and the dispensing apparatus from constituent parts of the first medium by the third medium or a mixture of the second and the third medium.

Abstract: A programmable logic array includes configurable logic cells disposed in lines and columns. Each of the logic cells has signal inputs, control inputs, at least one signal output, and an output driver circuit connected upstream of the at least one signal output. The output driver circuit has a terminal for a first and a second supply potential and is connected to at least one of the control inputs. The output driver circuit is controllable for setting its driver capacity to a level other than zero, corresponding to a signal value, by a digital signal applied to the at least one control input. Conductor tracks and switching elements for interconnecting the conductor tracks connect the at least one signal output of each of the logic cells to at least one of the signal inputs of at least another one of the logic cells.