Abstract: A method includes: a) measuring individual parts K1-KN of an optical system to provide measurement data, N being greater than one; b) using the measurement data to virtualize the individual parts K1-KN and using the virtualized individual parts K1-KN to generate an actual assembly model by geometrically stringing together a plurality of the virtualized individual parts K1-KN, the actual assembly model comprising virtual actual positions of the virtualized individual parts K1-KN in a virtually assembled state; c) using the actual assembly model and a target assembly model to determine a correction measure, the target assembly model comprising virtual target positions of one or more of the virtualized individual parts K1-KN in the virtually assembled state; and d) using the correction measure, assembling the individual parts K1-KN to form the optical system.

Abstract: The disclosure provides an optical system, having a first optical control loop, which is set up to regulate a position and/or spatial orientation of a first optical element relative to a first module sensor frame, and a first module control loop, which is set up to regulate a position and/or spatial orientation of the first module sensor frame relative to a base sensor frame.

Abstract: An optical arrangement, for example a lithography system, includes: a first component, in particular a carrying frame; a second component, in particular a mirror, which is movable in relation to the first component; and at least one stop with at least one stop face for limiting the movement of the second component in relation to the first component. The optical arrangement, preferably the stop, can have a fixing device for fixing the second component. The fixing device can have a fixing element that is movable in relation to the stop face of the stop. Further aspects of the device likewise relate to an optical arrangement with a fixing device or with a transport lock.

Abstract: The disclosure provides an optical system, having a first optical control loop, which is set up to regulate a position and/or spatial orientation of a first optical element relative to a first module sensor frame, and a first module control loop, which is set up to regulate a position and/or spatial orientation of the first module sensor frame relative to a base sensor frame.

Abstract: An optical arrangement, for example a lithography system, includes: a first component, in particular a carrying frame; a second component, in particular a mirror, which is movable in relation to the first component; and at least one stop with at least one stop face for limiting the movement of the second component in relation to the first component. The optical arrangement, preferably the stop, can have a fixing device for fixing the second component. The fixing device can have a fixing element that is movable in relation to the stop face of the stop. Further aspects of the device likewise relate to an optical arrangement with a fixing device or with a transport lock.

Abstract: The disclosure provides an optical system, having a first optical control loop, which is set up to regulate a position and/or spatial orientation of a first optical element relative to a first module sensor frame, and a first module control loop, which is set up to regulate a position and/or spatial orientation of the first module sensor frame relative to a base sensor frame. Related components and methods are also provided.

Abstract: A method for producing a lens for a lithography apparatus is disclosed. A measurement system for ascertaining an optical characteristic of a partial lens for a lithography apparatus is also disclosed.

Abstract: The disclosure provides an optical system, having a first optical control loop, which is set up to regulate a position and/or spatial orientation of a first optical element relative to a first module sensor frame, and a first module control loop, which is set up to regulate a position and/or spatial orientation of the first module sensor frame relative to a base sensor frame.

Abstract: An optical assembly, in particular for a lithography system for imaging lithographic micro- or nanostructures, includes at least two optical elements arranged successively in a beam path of the optical assembly, an acquisition device designed to acquire radiation signals from marking elements on or at the at least two optical elements, and a control device coupled to the acquisition device and which is designed to determine the plurality of properties of the optically active surface of the at least two optical elements as a function of the information contained in the radiation signals originating from the marking elements. The disclosure also relates to a method for operating the optical assembly.

Abstract: A method for producing a lens for a lithography apparatus is disclosed. A measurement system for ascertaining an optical characteristic of a partial lens for a lithography apparatus is also disclosed.

Abstract: The disclosure relates to an optical assembly for a projection exposure apparatus for semiconductor lithography. The optical assembly includes at least one optical element and a mounting body for mechanically fixing the element in a supporting structure. The optical assembly also includes at least one cooling body for dissipating heat from the element. The mounting body and the cooling body are separate from one another. The optical element is connected to the cooling body via at least one heat-conducting element. The disclosure also relates to a projection exposure apparatus including an optical assembly according to the disclosure.

Abstract: An optical assembly, in particular for a lithography system for imaging lithographic micro- or nanostructures, includes at least two optical elements arranged successively in a beam path of the optical assembly, an acquisition device designed to acquire radiation signals from marking elements on or at the at least two optical elements, and a control device coupled to the acquisition device and which is designed to determine the plurality of properties of the optically active surface of the at least two optical elements as a function of the information contained in the radiation signals originating from the marking elements. The disclosure also relates to a method for operating the optical assembly.

Abstract: The disclosure relates to an optical assembly for a projection exposure apparatus for semiconductor lithography. The optical assembly includes at least one optical element and a mounting body for mechanically fixing the element in a supporting structure. The optical assembly also includes at least one cooling body for dissipating heat from the element. The mounting body and the cooling body are separate from one another. The optical element is connected to the cooling body via at least one heat-conducting element. The disclosure also relates to a projection exposure apparatus including an optical assembly according to the disclosure.

Abstract: The invention relates to a filter device, preferably for hemodialysis, that consists of a cylindrical filter housing and a bundle of curled hollow fibers. The bundle is arranged in the filter housing. According to the invention, the curled hollow fibers are provided with an essentially sinusoidal texture and a wavelength that is defined by means of certain limits. The invention also relates to a curled hollow fiber and a method for filling a hollow fiber dialyser.

Abstract: The invention relates to a filter device, preferably for hemodialysis, that consists of a cylindrical filter housing and a bundle of curled hollow fibers. The bundle is arranged in the filter housing. According to the invention, the curled hollow fibers are provided with an essentially sinusoidal texture and a wavelength that is defined by means of certain limits. The invention also relates to a curled hollow fiber and a method for filling a hollow fiber dialyser.

Abstract: A hollow fiber filter device for dialysis having a housing and an end cap is described. The end cap is attached to an axial end of the housing, and has a curved channel in fluid communication with a fluid port, a fluid chamber having a flow path defined by a plurality of curved members connected to an upper interior surface. The distance between circumferentially adjacent curved members may decrease in a radially outward flow direction.

Abstract: A filter device for mass exchange between two media separated by a membrane providing a low-stress transfer of blood flow from the connection area of the filter device to the fibers of a hollow fiber bundle is disclosed. Relatively uniform utilization of the fibers is provided by a membrane in the form of a hollow fiber bundle whose fiber cavities form a first flow space, with at least one inflow or outflow chamber connected to the first flow space being provided for supplying a medium to the hollow fiber bundle or removing a medium from the hollow fiber bundle. The inflow or outflow chamber is adjacent to an essentially circular or semicircular channel which is designed to be open in the direction of the ends of the hollow fibers and is connected to an inlet or outlet of the filter device.

Abstract: The invention relates to a method for the targeted deformation of an optical element, in particular a mirror that is positioned in an optical system. The optical element or a support element, on which the optical element is placed in such a way that forces acting on the support element cause a deformation of the optical element itself, are connected to a fixed structure indirectly by means of fixing elements or connecting members. The desired deformation of the optical element is achieved by a targeted variation of the fixing elements to modify the forces exerted in the fixing process on the optical element or the support element and/or the action of the moment of force and/or torque of the connecting members on the fixing elements.

Abstract: A closure element for sterile closure of connections, in particular connections of filter modules for dialysis, hemofiltration or ultrafiltration is described. A closure element with a simple design that provides a reliable seal is formed by having the closure element include a wall with an automatically closing slit-shaped indentation which when closed creates a germ-proof seal. The sealing element is used for sterile closure of connections of medical items, as well as for the medical items themselves.

Abstract: A filter device for mass exchange between two media separated by a membrane providing a low-stress transfer of blood flow from the connection area of the filter device to the fibers of a hollow fiber bundle is disclosed. Relatively uniform utilization of the fibers is provided by a membrane in the form of a hollow fiber bundle whose fiber cavities form a first flow space, with at least one inflow or outflow chamber connected to the first flow space being provided for supplying a medium to the hollow fiber bundle or removing a medium from the hollow fiber bundle. The inflow or outflow chamber is adjacent to an essentially circular or semicircular channel which is designed to be open in the direction of the ends of the hollow fibers and is connected to an inlet or outlet of the filter device.