Patents by Inventor Steffen Laube

Steffen Laube has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for measurement of a device under test
    Patent number: 7573283
    Abstract: A method is disclosed for measurement of wafers and other semiconductor components in a probe station, which serves for examination and testing of electronic components. The device under test is held by a chuck and at least one electric probe by a probe support and the device under test and the probe are selectively positioned relative to each other by a positioning device with electric drives and the device under test is contacted. The drive of the positioning device remains in a state of readiness until establishment of contact and is switched off after establishment of contact and before measurement of the device under test.
    Type: Grant
    Filed: June 19, 2007
    Date of Patent: August 11, 2009
    Assignee: SUSS Micro Tec Test Systems GmbH
    Inventors: Axel Schmidt, Frank Fehrmann, Ulf Hackius, Stojan Kanev, Steffen Laube, Jorg Kiesewetter
  • METHOD FOR MEASUREMENT OF A DEVICE UNDER TEST
    Publication number: 20080315903
    Abstract: A method is disclosed for measurement of wafers and other semiconductor components in a probe station, which serves for examination and testing of electronic components. The device under test is held by a chuck and at least one electric probe by a probe support and the device under test and the probe are selectively positioned relative to each other by a positioning device with electric drives and the device under test is contacted. The drive of the positioning device remains in a state of readiness until establishment of contact and is switched off after establishment of contact and before measurement of the device under test.
    Type: Application
    Filed: June 19, 2007
    Publication date: December 25, 2008
    Applicant: SUSS MICROTEC TEST SYSTEMS GMBH
    Inventors: Axel SCHMIDT, Frank FEHRMANN, Ulf HACKIUS, Stojan KANEV, Steffen LAUBE, Jorg KIESEWETTER