Abstract: A system and method for coating substrates includes transporting rolls and a collecting container for collecting coating material.

Abstract: A system and method for coating substrates includes transporting rolls and a collecting container for collecting coating material.

Abstract: The transport device especially for transporting flat substrates through a coating installation comprises a plurality of transporting rolls, which are arranged transversely in relation to the transporting direction, and supporting rolls are also provided.

Abstract: Conveyor devices, in particular for use in substrate treatment devices, and configurations of substrate treatment devices, in particular horizontal coating installations for the mass coating of plate-like substrates during the production of solar cells are provided. The conveyor device comprises a multiplicity of conveyor rollers, each mounted rotatably at both ends thereof. During operation of the conveyor device, at least one conveyor roller is displaceable axially, i.e. parallel to the axis of rotation thereof.

Abstract: A method and device are provided for cleaning of an optical position measurement system in a coating installation. The optical position measurement system includes a cantilever, and a sensor head having a radiation inlet and/or outlet for the reception and/or emission of an optical signal, at a free end of the cantilever. For tempering of the sensor head, a local thermoregulation is applied using a heater and/or cooling device for heating and/or cooling of the sensor head depending on thermal conductivity of material of at least the sensor head and depending on secondary heat in the coating installation.

Abstract: The transport device especially for transporting flat substrates through a coating installation comprises a plurality of transporting rolls, which are arranged transversely in relation to the transporting direction, and supporting rolls are also provided.

Abstract: The transport device especially for transporting flat substrates through a coating installation comprises a plurality of transporting rolls, which are arranged transversely in relation to the transporting direction, and supporting rolls are also provided.

Abstract: The invention relates to a transport device, especially for transporting flat substrates through a coating installation. Said transport device comprises a plurality of transport rolls (4) disposed at an angle to the direction of transport (2) and received on both sides in a rotational manner. The upper surface lines of the transport rolls (4) define the plane of transport (3) and at least a part of the transport rolls (4) can be driven. The invention is characterized in that at least a plurality of backup rolls (5) is disposed at an angle to the direction of transport (2) and are received on both sides in a rotational manner in a parallel plane (6) which lies below the plane of transport (3). In an embodiment of the invention, at least one bridging roll (8) is provided. Said bridging roll lies in parallel on the two backup rolls (5) and has a diameter selected in such a manner that the upper surface line of the roll lies in the plane of transport (3).

Abstract: A vacuum coating system for coating elongate substrates includes one or several coating sections and one or several pump sections, at lease one magnetron in an arrangement as a sputter-down-variant above the substrate which has a target surface opposite the upper side of the substrate and/or in an arrangement as a sputter-up-variant below the substrate which has a target surface opposite the lower side of the substrate, and a transport device. The aim is to form an inline coating system for the two lateral coatings of elongate substrates, wherein construction costs and space required are reduced. The aim is achieved by use of a transport device arranged in a divided manner on a drive plane and on a transport plane. In sputter-up-variants, the underside of a magnetron body containing the magnetron lies above the drive plane.