Patents by Inventor Steffen Runkel

Steffen Runkel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20050142290
    Abstract: The present invention provides a substrate support adapter system, wherein the substrate support comprises an internal space in which at least one substrate can be arranged as well as an annular outer wall extending vertically with respect to the center plane of the substrate support and limiting the internal space towards the outside. On the outer circumference of the wall of the substrate support, a circumference convex projection, whose vertex is intersected by the center plane, as well as two circumferential concave grooves extending symmetrically with respect to the center plane are arranged as adapters, which are intended for engaging with a holding and/or gripping means for the substrate support. The present invention is advantageous in that a uniform device for manipulating substrates having different shapes and sizes in one system is provided.
    Type: Application
    Filed: November 26, 2004
    Publication date: June 30, 2005
    Inventors: Stefan Kempf, Thomas Merz, Steffen Runkel