Patents by Inventor Steffen Siegler

Steffen Siegler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11927500
    Abstract: Methods for characterizing the surface shapes of optical elements include the following steps: carrying out, in an interferometric test arrangement, at least a first interferogram measurement on the optical element by superimposing a test wave, which has been generated by diffraction of electromagnetic radiation on a diffractive element and has been reflected at the optical element, carrying out at least one additional interferogram measurement on in each case one calibrating mirror for determining calibration corrections, and determining the deviation from the target shape of the optical element based on the first interferogram measurement carried out on the optical element and the determined calibration corrections. At least two interferogram measurements are carried out for the at least one calibrating mirror, which differ from one another with regard to the polarization state of the electromagnetic radiation.
    Type: Grant
    Filed: April 14, 2022
    Date of Patent: March 12, 2024
    Assignee: CARL ZEISS SMT GMBH
    Inventors: Steffen Siegler, Johannes Ruoff, Alexander Wolf, Michael Carl, Toralf Gruner, Thomas Schicketanz
  • Publication number: 20220236139
    Abstract: Methods for characterizing the surface shapes of optical elements include the following steps: carrying out, in an interferometric test arrangement, at least a first interferogram measurement on the optical element by superimposing a test wave, which has been generated by diffraction of electromagnetic radiation on a diffractive element and has been reflected at the optical element, carrying out at least one additional interferogram measurement on in each case one calibrating mirror for determining calibration corrections, and determining the deviation from the target shape of the optical element based on the first interferogram measurement carried out on the optical element and the determined calibration corrections. At least two interferogram measurements are carried out for the at least one calibrating mirror, which differ from one another with regard to the polarization state of the electromagnetic radiation.
    Type: Application
    Filed: April 14, 2022
    Publication date: July 28, 2022
    Inventors: Steffen SIEGLER, Johannes Ruoff, Alexander Wolf, Michael Carl, Toralf Gruner, Thomas Schicketanz
  • Patent number: 11326872
    Abstract: A method and a device for characterizing the surface shape of an optical element. In the method, in at least one interferogram measurement carried out by an interferometric test arrangement, a test wave reflected at the optical element is caused to be superimposed with a reference wave not reflected at the optical element. In this case, the figure of the optical element is determined on the basis of at least two interferogram measurements using electromagnetic radiation having in each case linear input polarization or in each case circular input polarization, wherein the input polarizations for the two interferogram measurements differ from one another.
    Type: Grant
    Filed: January 15, 2021
    Date of Patent: May 10, 2022
    Assignee: CARL ZEISS SMT GMBH
    Inventors: Steffen Siegler, Thomas Schicketanz
  • Publication number: 20210140762
    Abstract: A method and a device for characterizing the surface shape of an optical element. In the method, in at least one interferogram measurement carried out by an interferometric test arrangement, a test wave reflected at the optical element is caused to be superimposed with a reference wave not reflected at the optical element. In this case, the figure of the optical element is determined on the basis of at least two interferogram measurements using electromagnetic radiation having in each case linear input polarization or in each case circular input polarization, wherein the input polarizations for the two interferogram measurements differ from one another.
    Type: Application
    Filed: January 15, 2021
    Publication date: May 13, 2021
    Inventors: Steffen SIEGLER, Thomas SCHICKETANZ
  • Patent number: 9912917
    Abstract: A visualization apparatus for a surgical site includes a recording unit for recording an image of an object arranged in a focal plane of the recording unit. The recording unit has a lens having an optical axis that intersects the focal plane at a point P. An electronic image representation unit has an image surface for reproducing the recorded image and point P is reproduced at image point P?. A mirror unit has a mirror surface, which has a center point S and is arranged relative to the image surface such that the reproduced image is reflected by the mirror surface. The focal plane, image surface and mirror surface are arranged relative to one another such that an observation point B results for which the following applies: ?2 D<?1??2<+2 D; wherein: ?1=?1/d1 ?2=?1/d2 d1=distance PB d2=distance P?S+distance SB.
    Type: Grant
    Filed: November 13, 2015
    Date of Patent: March 6, 2018
    Assignee: Carl Zeiss Meditec AG
    Inventors: Markus Seesselberg, Joachim Steffen, Steffen Siegler, Christian Voigt
  • Publication number: 20160142683
    Abstract: A visualization apparatus for a surgical site includes a recording unit for recording an image of an object arranged in a focal plane of the recording unit. The recording unit has a lens having an optical axis that intersects the focal plane at a point P. An electronic image representation unit has an image surface for reproducing the recorded image and point P is reproduced at image point P?. A mirror unit has a mirror surface, which has a center point S and is arranged relative to the image surface such that the reproduced image is reflected by the mirror surface. The focal plane, image surface and mirror surface are arranged relative to one another such that an observation point B results for which the following applies: ?2 D<?1??2<+2 D; wherein: ?1=?1/d1 ?2=?1/d2 d1=distance PB d2=distance P?S+distance SB.
    Type: Application
    Filed: November 13, 2015
    Publication date: May 19, 2016
    Inventors: Markus Seesselberg, Joachim Steffen, Steffen Siegler, Christian Voigt