Patents by Inventor Steffen Steinert

Steffen Steinert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240280912
    Abstract: A method for measuring photomasks for semiconductor lithography, includes the following steps: loading a photomask into a recording unit of a measuring apparatus, recording images of individual measurement regions on the photomask by means of an image capturing unit, comparing at least one recorded image of a measurement region with a simulated image of this measurement region using specific simulation parameters. In the process, the comparison of at least one of the recorded images with the corresponding simulated image is used to carry out an adjustment of at least one portion of the simulation parameters.
    Type: Application
    Filed: May 1, 2024
    Publication date: August 22, 2024
    Inventors: Steffen Steinert, Susanne Toepfer, Carsten Schmidt
  • Patent number: 11899358
    Abstract: The invention relates to a method for measuring a photomask for semiconductor lithography, including the following steps: recording an aerial image of at least one region of the photomask, defining at least one region of interest, ascertaining structure edges in at least one region of interest, providing desired structures to be produced by the photomask, adapting the ascertained structure edges to the desired structures, and displacing the adapted structure edges by means of the results of a separate registration measurement.
    Type: Grant
    Filed: February 17, 2021
    Date of Patent: February 13, 2024
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Dmitry Simakov, Thomas Thaler, Steffen Steinert, Dirk Beyer, Ute Buttgereit
  • Publication number: 20210255541
    Abstract: The invention relates to a method for measuring a photomask for semiconductor lithography, including the following steps: recording an aerial image of at least one region of the photomask, defining at least one region of interest, ascertaining structure edges in at least one region of interest, providing desired structures to be produced by the photomask, adapting the ascertained structure edges to the desired structures, and displacing the adapted structure edges by means of the results of a separate registration measurement.
    Type: Application
    Filed: February 17, 2021
    Publication date: August 19, 2021
    Inventors: Dmitry Simakov, Thomas Thaler, Steffen Steinert, Dirk Beyer, Ute Buttgereit
  • Patent number: 10380733
    Abstract: The invention relates to a method and an apparatus for determining a position of at least one structure element of a photolithographic mask, wherein the method comprises the following steps: (a) providing a reference image of the at least one structure element; (b) deriving a data record for the reference image, said data record comprising metadata relating to the reference image; (c) providing at least one measured image of the at least one structure element of the photolithographic mask; and (d) optimizing the reference image by use of the derived data record and correlating the at least one measured image and the optimized reference image.
    Type: Grant
    Filed: July 8, 2016
    Date of Patent: August 13, 2019
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Dirk Seidel, Steffen Steinert
  • Publication number: 20170018064
    Abstract: The invention relates to a method and an apparatus for determining a position of at least one structure element of a photolithographic mask, wherein the method comprises the following steps: (a) providing a reference image of the at least one structure element; (b) deriving a data record for the reference image, said data record comprising metadata relating to the reference image; (c) providing at least one measured image of the at least one structure element of the photolithographic mask; and (d) optimizing the reference image by use of the derived data record and correlating the at least one measured image and the optimized reference image.
    Type: Application
    Filed: July 8, 2016
    Publication date: January 19, 2017
    Inventors: Dirk Seidel, Steffen Steinert
  • Patent number: 9499601
    Abstract: There is presently provided a probe comprising an isolated sphingolipid binding domain (SBD) polypeptide, wherein the isolated SBD polypeptide is capable of binding to a sphingolipid, and methods and uses relating to such a probe.
    Type: Grant
    Filed: September 12, 2007
    Date of Patent: November 22, 2016
    Assignee: Agency for Science, Technology and Research
    Inventors: Rachel Kraut, Steffen Steinert, Sarita Hebbar
  • Publication number: 20100021383
    Abstract: There is presently provided a probe comprising an isolated sphingolipid binding domain (SBD) polypeptide, wherein the isolated SBD polypeptide is capable of binding to a sphingolipid, and methods and uses relating to such a probe.
    Type: Application
    Filed: September 12, 2007
    Publication date: January 28, 2010
    Inventors: Rachel Kraut, Steffen Steinert, Sarita Hebbar