Abstract: A scanning micromirror system includes a base having an axis passing therethrough, a plurality of support flexures coupled to the base, and a platform coupled to the base by the plurality of support flexures. The platform has a first side and a second side opposing the first side and is operable to oscillate about the axis. The scanning micromirror system also includes a stress relief layer positioned on the first side of the platform and a reflector positioned on the first side of the platform. The stress relief layer is positioned between the reflector and the platform.

Abstract: Described are scanning micromirror devices, methods of making scanning micromirror devices, two-dimensional optical scanning systems that incorporate scanning micromirror devices, and methods of projecting light and images using two-dimensional optical scanning systems. The disclosed two-dimensional optical scanning systems can incorporate a first scanning micromirror device oscillating at a relatively higher frequency, which directs reflected light onto a second scanning micromirror device oscillating at a relatively lower frequency, which directs reflected light for projection.

Abstract: Described herein are methods and display systems for enhanced eye tracking for display systems, such as augmented or virtual reality display systems. The display systems may include: a light source configured to output light and a moveable diffractive grating configured to reflect light from the light source, the reflected light forming a light pattern on the eye of the user; a plurality of light detectors to detect light reflected from the eye; and one or more processors. The display system changes the orientation of the diffractive grating, such that the light pattern reflected from the diffractive grating is scanned along an axis across the eye. Light intensity patterns are obtained via the light detectors, with a light intensity pattern representing a light detector signal obtained by detecting light reflected off of the eye as the light pattern is scanned across the eye.

Abstract: Described are scanning micromirror devices, methods of making scanning micromirror devices, two-dimensional optical scanning systems that incorporate scanning micromirror devices, and methods of projecting light and images using two-dimensional optical scanning systems. The disclosed two-dimensional optical scanning systems can incorporate a first scanning micromirror device oscillating at a relatively higher frequency, which directs reflected light onto a second scanning micromirror device oscillating at a relatively lower frequency, which directs reflected light for projection.

Abstract: Described herein are methods and display systems for enhanced eye tracking for display systems, such as augmented or virtual reality display systems. The display systems may include: a light source configured to output light and a moveable diffractive grating configured to reflect light from the light source, the reflected light forming a light pattern on the eye of the user; a plurality of light detectors to detect light reflected from the eye; and one or more processors. The display system changes the orientation of the diffractive grating, such that the light pattern reflected from the diffractive grating is scanned along an axis across the eye. Light intensity patterns are obtained via the light detectors, with a light intensity pattern representing a light detector signal obtained by detecting light reflected off of the eye as the light pattern is scanned across the eye.