Abstract: Accelerometer including a decoupling structure for fixing the accelerometer on a package and a MEMS sensor chip for measuring an acceleration. The chip is supported by the decoupling structure and includes a sensor wafer layer of a semiconductor material. The decoupling structure forms a bottom portion for fixing the decoupling structure on the package and a top portion fixed to the sensor wafer layer so that the chip is arranged above the decoupling structure. A width of the top portion in a planar direction is smaller than a width of the bottom portion and/or the sensor wafer layer in the planar direction. The decoupling structure is made of the same semiconductor material as the sensor wafer layer. The centre point of the top portion is arranged in a central region of the bottom portion. The chip includes a hermetically closed cavity which includes a seismic mass of the chip.

Abstract: Accelerometer including a decoupling structure for fixing the accelerometer on a package and a MEMS sensor chip for measuring an acceleration. The chip is supported by the decoupling structure and includes a sensor wafer layer of a semiconductor material. The decoupling structure forms a bottom portion for fixing the decoupling structure on the package and a top portion fixed to the sensor wafer layer so that the chip is arranged above the decoupling structure. A width of the top portion in a planar direction is smaller than a width of the bottom portion and/or the sensor wafer layer in the planar direction. The decoupling structure is made of the same semiconductor material as the sensor wafer layer. The centre point of the top portion is arranged in a central region of the bottom portion. The chip includes a hermetically closed cavity which includes a seismic mass of the chip.

Abstract: This switching device comprises at least one cell made up of a moving structure consisting in a flexible cantilever beam (14) and an integral screen (16) attached to said beam, being able to move between two end positions (A, B) and of actuating electrodes (20) for subjecting said structure to forces of attraction to control its movements. The electrodes (20) are located on each side of the beam (14) in such a way as to follow its exact shape when it is in one of its two end positions. A regular movement of the moving structure and a reliable operating of the switching device are thus obtained This invention may be used in optical switching applications.

Abstract: This switching device comprises at least one cell made up of a moving structure consisting in a flexible cantilever beam (14): and an integral screen (6) attached to said beam, being able to move between two end positions (A, B) and of actuating electrodes (20) for subjecting said structure to forces of attraction to control its movements The electrodes (20) are located on each side of the beam (14) in such a way as to follow its exact shape when it is in one of its two end positions. A regular movement of the moving structure and a reliable operating of the switching device are thus obtained This invention may be used in optical switching applications.