Patents by Inventor Stephan Lanio

Stephan Lanio has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5021670
    Abstract: The multipole element has an even number of pole pieces (PS, PS') which are rranged symmetrically with respect to the optical axis (OA) of an electron beam measuring device and are rigidly connected to a ring-shaped yoke (J) by bar-shaped mounting elements (PH, PH'). A beam tube (SR), which is made from an electrically insulating material and has vacuum-tight ducts to receive the mounting elements (PH, PH') which are rigidly connected to the pole pieces (PS, PS'), is arranged coaxially with respect to the optical axis (OA) inside the yoke (J) which serves to guide the magnetic flux. The coils (SP, SP') for magnetic excitation of the pole pieces (PS, PS') are arranged on the parts of the mounting elements (PH, PH') lying outside the beam tube (SR). In order to generate an electrical multipole field suitable potentials (U, U') are applied to the pole pieces (PS, PS').
    Type: Grant
    Filed: January 11, 1990
    Date of Patent: June 4, 1991
    Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
    Inventors: Stephan Lanio, Maximilian Haider