Patents by Inventor Stephan Machill

Stephan Machill has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for production of a semiconductor structure
    Patent number: 7141507
    Abstract: A method for producing a semiconductor structure including preparing a semiconductor substrate, and generating a lower first, a middle second and an upper third masking layer on a surface of the semiconductor substrate. The method further includes forming at least one first window in the upper third masking layer, structuring the middle second masking layer using the first window for transferring the first window, structuring the lower first masking layer using the first window for transferring the first window, and enlarging the first window to form a second window. The method for further includes restructuring the middle second masking layer using the second window for transferring the second window, structuring the semiconductor substrate, using the structured lower third masking layer, restructuring the lower first masking layer using the second window, and restructuring the semiconductor substrate using the restructured lower third masking layer.
    Type: Grant
    Filed: February 25, 2005
    Date of Patent: November 28, 2006
    Assignee: Infineon Technologies AG
    Inventors: Oliver Genz, Markus Kirchhoff, Stephan Machill, Alexander Reb, Barbara Schmidt, Momtchil Stavrev, Maik Stegemann, Stephan Wege