Abstract: A system and method of nanoparticle deposition for achieving an acetone sensitive response based on ruthenium decorated CuO nanowires at temperatures of 200° C. and 250° C. is disclosed. This method is useful for building sensors. The method used to build the sensor is easily integrable into silicon technology broadly, and into a CMOX compatible device specifically. Additionally, it is expected that this method of nanoparticle deposition can be transferred to other MOx nanowire sensors, such as but not limited to zinc oxide nanowire.

Abstract: A gas sensor includes a substrate; a pair of electrodes facing each other on the substrate; and a plurality of metallic nanocubes each containing Fe, aggregated between the pair of electrodes and forming percolating paths between the pair of electrodes.

Abstract: A method for manufacturing nanoparticle decorated nanowires by a vacuum deposition system having a deposition chamber and an aggregation chamber connected thereto includes: mounting a metal member in the deposition chamber; performing thermal oxidization of the metal member in the deposition chamber in an oxygen atmosphere so as to grow metal oxide nanowires on a surface of the metal member; without breaking vacuum in the vacuum deposition system, generating a vapor of a catalytic metal particles clusters in the aggregation chamber that is connected to the deposition chamber; and without breaking vacuum in the vacuum deposition system, transporting the generated catalytic metal particles clusters to the deposition chamber so as to decorate the metal oxide nanowires with catalytic metal nanoparticles made of the catalytic metal particles.