Patents by Inventor Stephan T. Melnychuk

Stephan T. Melnychuk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20100176313
    Abstract: An apparatus for generating EUV radiation is disclosed which may include a target material, a system generating a laser beam for interaction with the target material and a pair of electrodes. A pulse power electrical circuit may be provided for generating a discharge between said electrodes to produce EUV radiation from said target material.
    Type: Application
    Filed: December 14, 2009
    Publication date: July 15, 2010
    Applicant: Cymer, Inc.
    Inventors: Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness, Norbert Bowering, Oleh Khodykin, Curtis L. Rettiq, Gerry M. Blumenstock, Timothy S. Dyer, Rodney D. Simmons, Jerzy R. Hoffman, R. Mark Johnson
  • Patent number: 7570741
    Abstract: Diamond based proton beam target (12) designs for use in contraband detection/indentification systems. Such novel Diamond based proton beam targets (12) are used in Electrostatic and RF Accelerator based devices for generating proton beams (10) that impinge on the targets (12) for generating single or multiple monoenergetic gamma ray (15) beams used in detection/measurement of contraband.
    Type: Grant
    Filed: August 6, 2004
    Date of Patent: August 4, 2009
    Assignee: Contraband Detection Systems, L.L.C.
    Inventors: Stephan T. Melnychuk, Raymond J. Meilunas
  • Patent number: 7368741
    Abstract: The present invention provides a reliable, high-repetition rate, production line compatible high energy photon source. A very hot plasma containing an active material is produced in vacuum chamber. The active material is an atomic element having an emission line within a desired extreme ultraviolet (EUV) range. A pulse power source comprising a charging capacitor and a magnetic compression circuit comprising a pulse transformer, provides electrical pulses having sufficient energy and electrical potential sufficient to produce the EUV light at an intermediate focus at rates in excess of 5 Watts. In preferred embodiments designed by Applicants in-band, EUV light energy at the intermediate focus is 45 Watts extendable to 105.8 Watts.
    Type: Grant
    Filed: April 14, 2005
    Date of Patent: May 6, 2008
    Assignee: Cymer, Inc.
    Inventors: Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness, Norbert R. Bowering, Oleh Khodykin, Curtis L. Rettig, Gerry M. Blumenstock, Timothy S. Dyer, Rodney D. Simmons, Jerzy R. Hoffman, R. Mark Johnson
  • Patent number: 6972421
    Abstract: The present invention provides a reliable, high-repetition rate, production line compatible high energy photon source. A very hot plasma containing an active material is produced in vacuum chamber. The active material is an atomic element having an emission line within a desired extreme ultraviolet (EUV) range. A pulse power source comprising a charging capacitor and a magnetic compression circuit comprising a pulse transformer, provides electrical pulses having sufficient energy and electrical potential sufficient to produce the EUV light at an intermediate focus at rates in excess of 5 Watts. In preferred embodiments designed by Applicants in-band, EUV light energy at the intermediate focus is 45 Watts extendable to 105.8 Watts.
    Type: Grant
    Filed: April 8, 2003
    Date of Patent: December 6, 2005
    Assignee: Cymer, Inc.
    Inventors: Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness, Norbert Bowering, Oleh Khodykin, Curtis L. Rettig, Gerry M. Blumenstock, Timothy S. Dyer, Rodney D. Simmons, Jerzy R. Hoffman, R. Mark Johnson
  • Patent number: 6815700
    Abstract: The present invention provides a high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. The chamber contains a working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at voltages high enough to create electrical discharges between the electrodes to produce very high temperature, high density plasma pinches in the working gas providing radiation at the spectral line of the source or active gas. Preferably the electrodes are configured co-axially. The central electrode is preferably hollow and the active gas is introduced out of the hollow electrode. This permits an optimization of the spectral line source and a separate optimization of the buffer gas. In preferred embodiments the central electrode is pulsed with a high negative electrical pulse so that the central electrode functions as a hollow cathode.
    Type: Grant
    Filed: July 3, 2002
    Date of Patent: November 9, 2004
    Assignee: Cymer, Inc.
    Inventors: Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness, Norbert Bowering, Oleh Khodykin
  • Publication number: 20040108473
    Abstract: The present invention provides a reliable, high-repetition rate, production line compatible high energy photon source. A very hot plasma containing an active material is produced in vacuum chamber. The active material is an atomic element having an emission line within a desired extreme ultraviolet (EUV) range. A pulse power source comprising a charging capacitor and a magnetic compression circuit comprising a pulse transformer, provides electrical pulses having sufficient energy and electrical potential sufficient to produce the EUV light at an intermediate focus at rates in excess of 5 Watts. In preferred embodiments designed by Applicants in-band, EUV light energy at the intermediate focus is 45 Watts extendable to 105.8 Watts.
    Type: Application
    Filed: April 8, 2003
    Publication date: June 10, 2004
    Inventors: Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness, Norbert Bowering, Oleh Khodykin, Curtis L. Rettig, Gerry M. Blumenstock, Timothy S. Dyer, Rodney D. Simmons, Jerzy R. Hoffman, R. Mark Johnson
  • Patent number: 6586757
    Abstract: A high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. The chamber contains a working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at repetition rates of 1000 Hz or greater and at voltages high enough to create electrical discharges between the electrodes to produce very high temperature, high density plasma pinches in the working gas providing radiation at the spectral line of the source or active gas. A fourth generation unit is described which produces 20 mJ, 13.5 nm pulses into 2 &pgr; steradians at repetition rates of 2000 Hz with xenon as the active gas. This unit includes a pulse power system having a resonant charger charging a charging capacitor bank, and a magnetic compression circuit comprising a pulse transformer for generating the high voltage electrical pulses at repetition rates of 2000 Hz or greater.
    Type: Grant
    Filed: June 6, 2001
    Date of Patent: July 1, 2003
    Assignee: Cymer, Inc.
    Inventors: Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, Richard M. Ness, Daniel L. Birx late of, Richard L. Sandstrom, John E. Rauch
  • Patent number: 6566668
    Abstract: A high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. The chamber contains a working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at repetition rates of 1000 Hz or greater and at voltages high enough to create electrical discharges between the electrodes to produce very high temperature, high density plasma pinches in the working gas providing radiation at the spectral line of the source or active gas. A fourth generation unit is described which produces 20 mJ, 13.5 nm pulses into 2 &pgr; steradians at repetition rates of 2000 Hz with xenon as the active gas. This unit includes a pulse power system having a resonant charger charging a charging capacitor bank, and a magnetic compression circuit comprising a pulse transformer for generating the high voltage electrical pulses at repetition rates of 2000 Hz or greater.
    Type: Grant
    Filed: June 6, 2001
    Date of Patent: May 20, 2003
    Assignee: Cymer, Inc.
    Inventors: John E. Rauch, William N. Partlo, Igor V. Fomenkov, Richard M. Ness, Daniel L. Birx, Richard L. Sandstrom, Stephan T. Melnychuk
  • Publication number: 20030006383
    Abstract: The present invention provides a high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. The chamber contains a working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at voltages high enough to create electrical discharges between the electrodes to produce very high temperature, high density plasma pinches in the working gas providing radiation at the spectral line of the source or active gas. Preferably the electrodes are configured co-axially. The central electrode is preferably hollow and the active gas is introduced out of the hollow electrode. This permits an optimization of the spectral line source and a separate optimization of the buffer gas. In preferred embodiments the central electrode is pulsed with a high negative electrical pulse so that the central electrode functions as a hollow cathode.
    Type: Application
    Filed: July 3, 2002
    Publication date: January 9, 2003
    Inventors: Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness, Norbert Bowering, Oleh Khodykin
  • Publication number: 20020014598
    Abstract: A high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. The chamber contains a working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at repetition rates of 1000 Hz or greater and at voltages high enough to create electrical discharges between the electrodes to produce very high temperature, high density plasma pinches in the working gas providing radiation at the spectral line of the source or active gas. A fourth generation unit is described which produces 20 mJ, 13.5 nm pulses into 2 &pgr; steradians at repetition rates of 2000 Hz with xenon as the active gas. This unit includes a pulse power system having a resonant charger charging a charging capacitor bank, and a magnetic compression circuit comprising a pulse transformer for generating the high voltage electrical pulses at repetition rates of 2000 Hz or greater.
    Type: Application
    Filed: June 6, 2001
    Publication date: February 7, 2002
    Inventors: Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, Richard M. Ness, Daniel L. Birx, Richard L. Sandstrom, John E. Rauch
  • Publication number: 20020014599
    Abstract: A high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. The chamber contains a working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at repetition rates of 1000 Hz or greater and at voltages high enough to create electrical discharges between the electrodes to produce very high temperature, high density plasma pinches in the working gas providing radiation at the spectral line of the source or active gas. A fourth generation unit is described which produces 20 mJ, 13.5 nm pulses into 2 &pgr; steradians at repetition rates of 2000 Hz with xenon as the active gas. This unit includes a pulse power system having a resonant charger charging a charging capacitor bank, and a magnetic compression circuit comprising a pulse transformer for generating the high voltage electrical pulses at repetition rates of 2000 Hz or greater.
    Type: Application
    Filed: June 6, 2001
    Publication date: February 7, 2002
    Inventors: John E. Rauch, William N. Partlo, Igor V. Fomenkov, Richard M. Ness, Daniel L. Birx, Richard L. Sandstrom, Stephan T. Melnychuk