Patents by Inventor Stephane Astie

Stephane Astie has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electronic device and method for forming a membrane for an electronic device
    Patent number: 6022754
    Abstract: An electronic device comprises a semiconductor substrate (2) having a cavity (32) extending into the substrate (2), a membrane (8) formed over the semiconductor substrate so as to extend across the cavity (32) in the semiconductor substrate and an active region (14, 30) supported by the membrane (8) and positioned adjacent the cavity (32). The membrane (8) comprises a single dielectric layer formed of an oxy-nitride material.
    Type: Grant
    Filed: July 22, 1998
    Date of Patent: February 8, 2000
    Assignee: Motorola, Inc.
    Inventors: Jean-Paul Guillemet, Myriam Combes, Stephane Astie, Emmanuel Scheid