Patents by Inventor Stephane Durant

Stephane Durant has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical defect amplification for improved sensitivity on patterned layers
    Patent number: 8705027
    Abstract: A method for wafer defect inspection may include, but is not limited to: providing an inspection target; applying at least one defect inspection enhancement to the inspection target; illuminating the inspection target including the at least one inspection enhancement to generate one or more inspection signals associated with one or more features of the inspection target; detecting the inspection signals; and generating one or more inspection parameters from the inspection signals. An inspection target may include, but is not limited to: at least one inspection layer; and at least one inspection enhancement layer.
    Type: Grant
    Filed: July 15, 2010
    Date of Patent: April 22, 2014
    Assignee: KLA-Tencor Corporation
    Inventors: Steven R. Lange, Stephane Durant, Gregory L. Kirk, Robert M. Danen, Prashant Aji
  • OPTICAL DEFECT AMPLIFICATION FOR IMPROVED SENSITIVITY ON PATTERNED LAYERS
    Publication number: 20120113416
    Abstract: A method for wafer defect inspection may include, but is not limited to: providing an inspection target; applying at least one defect inspection enhancement to the inspection target; illuminating the inspection target including the at least one inspection enhancement to generate one or more inspection signals associated with one or more features of the inspection target; detecting the inspection signals; and generating one or more inspection parameters from the inspection signals. An inspection target may include, but is not limited to: at least one inspection layer; and at least one inspection enhancement layer.
    Type: Application
    Filed: July 15, 2010
    Publication date: May 10, 2012
    Applicant: KLA-TENCOR CORPORATION
    Inventors: Steven R. Lange, Stephane Durant, Gregory L. Kirk, Robert M. Danen, Prashant Aji