Abstract: An acoustic sensor device comprises a package, a substrate disposed in the package or forming a part of the package, and one or more microelectromechanical system (MEMS) transducers supported by the substrate and packaged in the package. The one or more MEMS transducers include a plurality of sensing elements including at least a first sensing element and a second sensing element. The one or more MEMS transducers are positioned in the package such the first sensing element exhibits a first directionality pick-up pattern with respect to sound waves traveling in an ambient environment of the acoustic sensor device and the second sensing element exhibits a second directionality pick-up pattern with respect to the sound waves traveling in the ambient environment of the acoustic sensor device. The second directionality pick-up pattern is different from the first directionality pick-up pattern.

Abstract: A microphone module includes a first microelectromechanical system (MEMS) transducer comprising a first cantilever and a first fixed electrode and a second MEMS transducer comprising a second cantilever and a second fixed electrode. The first MEMS transducer and the second MEMS transducer are arranged in the microphone module such that when a sound wave traverses the microphone module the sound wave causes the first MEMS transducer and the second MEMS transducer to move in different directions with respect to each other.

Abstract: An acoustic sensor device includes a substrate and a first transducer supported by the substrate, the first transducer configured to generate a first output signal when exposed to a sound wave. The acoustic sensor device also include a second transducer supported by the substrate, the second transducer configured to generate a second output signal when exposed to a sound wave. The first transducer and the second transducer are configured such that the first output signal generated by the first transducer and the second output signal generated by the second transducer are opposite in polarity.

Abstract: A device for non-invasive monitoring and measuring of intraocular pressure (IOP) of a subject includes a flexible lens that fits on the eye and changes curvature in response to a change in curvature of the eye. A microchannel disposed in or on the lens has one or more ends that are open to the atmosphere and an indicator solution is disposed in a portion of the 5 microchannel. The microchannel exhibits a change in volume in response to a change in curvature of the lens, which results in a change in position of the indicator solution in the microchannel. The change in position of the indicator solution in the microchannel is indicative of a change in IOP. The change in position of the indicator solution may be detected in digital images of the lens taken with a camera of a mobile electronic device such 0 as a smartphone or a camera worn by the subject.

Abstract: An acoustic sensor module includes an acoustic sensor device including a transducer and an enclosure configured to encapsulate and seal the acoustic sensor device within the enclosure. The enclosure includes a first sound port configured to couple a first side of the transducer to an embodiment environment via a first acoustic channel formed in the enclosure. The enclosure also includes a second sound port configured to couple a second side of the transducer to the embodiment environment via a second acoustic channel formed in the enclosure. The enclosure additionally includes a notch formed on a surface of the enclosure. The notch is configured to enable detection of a leakage path, within the enclosure, between the first sound port and the second sound port around an outside of the acoustic sensor device.

Abstract: An acoustic sensor device comprises a package, a substrate disposed in the package or forming a part of the package, and a plurality of microelectromechanical system (MEMS) transducers supported by the substrate and packaged in the package. The plurality of sound ports configured to couple the plurality of MEMS transducers to an ambient environment of the acoustic sensor device. The plurality of sound ports are arranged in the package such that respective MEMS transducers, among the plurality of MEMS transducers, exhibit different directional pick-up patterns with respect to sound waves traveling in the ambient environment of the acoustic sensor device.

Abstract: An acoustic sensor device includes a substrate, a cavity formed in the substrate, and a microelectromechanical system (MEMS) transducer having a diaphragm supported by the substrate. The diaphragm includes a first portion configured to be fixed to the substrate and a second portion extending from the first portion and suspended over the cavity. The second portion is configured to vibrate when the MEMS transducer is subject to an external stimulus. The diaphragm also includes an anchor portion that attaches the first portion of the diaphragm to the substrate on at least two sides of the substrate such that an interface between the first portion of the diaphragm and the second portion of the diaphragm is moved away from an edge of the substrate along the cavity.

Abstract: An electrostatic transducer includes a substrate oriented in a plane, a fixed electrode supported by the substrate, and a moveable electrode supported by the substrate, spaced from the fixed electrode in a first direction parallel to the plane, and configured for movement in a second direction transverse to the plane, such that an extent to which the fixed and moveable electrodes overlap changes during the movement. The fixed and moveable electrodes comprise one or more of a plurality of conductive layers, the plurality of conductive layers including at least three layers. The fixed electrode includes a stacked arrangement of two or more spaced apart conductive layers of the plurality of conductive layers.

Abstract: A microelectromechanical (MEMS) transducer includes a substrate, a moveable electrode supported by the substrate, and a pair of fixed electrodes supported by the substrate, each fixed electrode of the pair of fixed electrodes being configured as a bias or sense electrode. The pair of fixed electrodes are disposed in a stacked arrangement. An end of the moveable electrode is configured for vibrational movement along the stacked arrangement during excitation of the moveable electrode. The pair of fixed electrodes are laterally spaced apart from the end of the moveable electrode to establish a capacitance indicative of the vibrational movement.

Abstract: Microphones, microphone systems, and methods for capturing and processing sound are described. The microphones and microphone systems may adaptively change the direction from which sound is captured. The microphones and microphone systems avoid the need to provide arrays of microphones, while providing adaptive beamforming without a time delay between each channel of information, and multi-directional sound capture. A dependency between the frequency response and system size is also avoided.

Abstract: A microelectromechanical system (MEMS) transducer includes a substrate and a pair of electrodes supported by the substrate. The pair of electrodes are configured as a bias electrode-sense electrode couple. A moveable electrode of the pair of electrodes is configured for vibrational movement in a first direction during excitation of the moveable electrode. The pair of electrodes are spaced apart from one another by a gap in a second direction perpendicular to the first direction. The moveable electrode includes a cantilevered end, the cantilevered end being warped to exhibit a resting deflection along the first direction.

Abstract: An acoustic sensor device comprises a package and a substrate disposed in the package. The acoustic sensor device also comprises a microelectromechanical system (MEMS) transducer formed in the substrate, the MEMS transducer i) comprising a cantilever structure and ii) having a first acoustic impedance and at least two sound ports positioned on the package on opposing sides of the MEMS transducer. The at least two sound ports coupling the MEMS transducer to an ambient environment via respective acoustic channels formed in the package, wherein the at least two sound ports are positioned on the package in a manner that ensures that the respective acoustic channels have a combined second acoustic impendence that is less the first acoustic impedance of the MEMS transducer.

Abstract: A microelectromechanical system (MEMS) transducer includes a substrate and a pair of electrodes supported by the substrate. The pair of electrodes are configured as a bias electrode-sense electrode couple. A moveable electrode of the pair of electrodes is configured for vibrational movement in a first direction during excitation of the moveable electrode. The pair of electrodes are spaced apart from one another by a gap in a second direction perpendicular to the first direction. The moveable electrode includes a cantilevered end, the cantilevered end being warped to exhibit a resting deflection along the first direction.

Abstract: A device includes a housing, an acoustic sensor disposed within the housing, the acoustic sensor comprising a microelectrornechanical (MEMS) transducer, a first port in the housing establishing a first acoustic path for air flow to the MEMS transducer, and a second port in the housing establishing a second acoustic path for air flow to the MEMS transducer. The first and second acoustic paths have an equal path length.

Abstract: A microelectromechanical system (MEMS) transducer includes a substrate and a pair of electrodes supported by the substrate. The pair of electrodes are configured as a bias electrode-sense electrode couple. A moveable electrode of the pair of electrodes is configured for vibrational movement in a first direction during excitation of the moveable electrode. The pair of electrodes are spaced apart from one another by a gap in a second direction perpendicular to the first direction. The moveable electrode includes a cantilevered end, the cantilevered end being warped to exhibit a resting deflection along the first direction.

Abstract: A device for non-invasive monitoring and measuring of intraocular pressure (IOP) of a subject includes a flexible lens that fits on the eye and changes curvature in response to a change in curvature of the eye. A microchannel disposed in or on the lens has one or more ends that are open to the atmosphere and an indicator solution is disposed in a portion of the 5 microchannel. The microchannel exhibits a change in volume in response to a change in curvature of the lens, which results in a change in position of the indicator solution in the microchannel. The change in position of the indicator solution in the microchannel is indicative of a change in IOP. The change in position of the indicator solution may be detected in digital images of the lens taken with a camera of a mobile electronic device such 0 as a smartphone or a camera worn by the subject.

Abstract: An electrostatic transducer includes a substrate oriented in a plane, a fixed electrode supported by the substrate, and a moveable electrode supported by the substrate, spaced from the fixed electrode in a first direction parallel to the plane, and configured for movement in a second direction transverse to the plane, such that an extent to which the fixed and moveable electrodes overlap changes during the movement. The fixed and moveable electrodes comprise one or more of a plurality of conductive layers, the plurality of conductive layers including at least three layers. The fixed electrode includes a stacked arrangement of two or more spaced apart conductive layers of the plurality of conductive layers.

Abstract: Microphones, microphone systems, and methods for capturing and processing sound are described. The microphones and microphone systems may adaptively change the direction from which sound is captured. The microphones and microphone systems avoid the need to provide arrays of microphones, while providing adaptive beamforming without a time delay between each channel of information, and multi-directional sound capture. A dependency between the frequency response and system size is also avoided.