Abstract: Microphones, microphone systems, and methods for capturing and processing sound are described. The microphones and microphone systems may adaptively change the direction from which sound is captured. The microphones and microphone systems avoid the need to provide arrays of microphones, while providing adaptive beamforming without a time delay between each channel of information, and multi-directional sound capture. A dependency between the frequency response and system size is also avoided.

Abstract: A microelectromechanical system (MEMS) transducer includes a substrate and a pair of electrodes supported by the substrate. The pair of electrodes are configured as a bias electrode-sense electrode couple. A moveable electrode of the pair of electrodes is configured for vibrational movement in a first direction during excitation of the moveable electrode. The pair of electrodes are spaced apart from one another by a gap in a second direction perpendicular to the first direction. The moveable electrode includes a cantilevered end, the cantilevered end being warped to exhibit a resting deflection along the first direction.

Abstract: An acoustic sensor device comprises a package and a substrate disposed in the package. The acoustic sensor device also comprises a microelectromechanical system (MEMS) transducer formed in the substrate, the MEMS transducer i) comprising a cantilever structure and ii) having a first acoustic impedance and at least two sound ports positioned on the package on opposing sides of the MEMS transducer. The at least two sound ports coupling the MEMS transducer to an ambient environment via respective acoustic channels formed in the package, wherein the at least two sound ports are positioned on the package in a manner that ensures that the respective acoustic channels have a combined second acoustic impendence that is less the first acoustic impedance of the MEMS transducer.

Abstract: A microelectromechanical system (MEMS) transducer includes a substrate and a pair of electrodes supported by the substrate. The pair of electrodes are configured as a bias electrode-sense electrode couple. A moveable electrode of the pair of electrodes is configured for vibrational movement in a first direction during excitation of the moveable electrode. The pair of electrodes are spaced apart from one another by a gap in a second direction perpendicular to the first direction. The moveable electrode includes a cantilevered end, the cantilevered end being warped to exhibit a resting deflection along the first direction.

Abstract: A device includes a housing, an acoustic sensor disposed within the housing, the acoustic sensor comprising a microelectrornechanical (MEMS) transducer, a first port in the housing establishing a first acoustic path for air flow to the MEMS transducer, and a second port in the housing establishing a second acoustic path for air flow to the MEMS transducer. The first and second acoustic paths have an equal path length.

Abstract: A microelectromechanical system (MEMS) transducer includes a substrate and a pair of electrodes supported by the substrate. The pair of electrodes are configured as a bias electrode-sense electrode couple. A moveable electrode of the pair of electrodes is configured for vibrational movement in a first direction during excitation of the moveable electrode. The pair of electrodes are spaced apart from one another by a gap in a second direction perpendicular to the first direction. The moveable electrode includes a cantilevered end, the cantilevered end being warped to exhibit a resting deflection along the first direction.

Abstract: A device for non-invasive monitoring and measuring of intraocular pressure (IOP) of a subject includes a flexible lens that fits on the eye and changes curvature in response to a change in curvature of the eye. A microchannel disposed in or on the lens has one or more ends that are open to the atmosphere and an indicator solution is disposed in a portion of the 5 microchannel. The microchannel exhibits a change in volume in response to a change in curvature of the lens, which results in a change in position of the indicator solution in the microchannel. The change in position of the indicator solution in the microchannel is indicative of a change in IOP. The change in position of the indicator solution may be detected in digital images of the lens taken with a camera of a mobile electronic device such 0 as a smartphone or a camera worn by the subject.

Abstract: An electrostatic transducer includes a substrate oriented in a plane, a fixed electrode supported by the substrate, and a moveable electrode supported by the substrate, spaced from the fixed electrode in a first direction parallel to the plane, and configured for movement in a second direction transverse to the plane, such that an extent to which the fixed and moveable electrodes overlap changes during the movement. The fixed and moveable electrodes comprise one or more of a plurality of conductive layers, the plurality of conductive layers including at least three layers. The fixed electrode includes a stacked arrangement of two or more spaced apart conductive layers of the plurality of conductive layers.

Abstract: Microphones, microphone systems, and methods for capturing and processing sound are described. The microphones and microphone systems may adaptively change the direction from which sound is captured. The microphones and microphone systems avoid the need to provide arrays of microphones, while providing adaptive beamforming without a time delay between each channel of information, and multi-directional sound capture. A dependency between the frequency response and system size is also avoided.