Abstract: A method of processing a substrate that includes: forming an etch mask over a ruthenium (Ru) metal layer of a substrate, the etch mask exposing a first portion of the Ru metal layer and covering a second portion of the Ru metal layer; and converting the first portion of the Ru metal layer into a volatile Ru etch product in a processing chamber, the converting including exposing the Ru metal layer of the substrate to a halogen-containing vapor, and to a ligand-exchange agent to form the volatile Ru etch product, where the converting is an oxygen-free process.

Abstract: Methods are provided herein for forming spacers on a patterned substrate. A self-aligned multiple patterning (SAMP) process is utilized for patterning structures, spacers formed adjacent mandrels, on a substrate. In one embodiment, a novel approach of etching titanium oxide (TiO2) spacers is provided. Highly anisotropic etching of the spacer along with a selective top deposition is provided. In one embodiment, an inductively coupled plasma (ICP) etch tool is utilized. The etching process may be achieved as a one-step etching process. More particularly, a protective layer may be selectively formed on the top of the spacer to protect the mandrel as well as minimize the difference of the etching rates of the spacer top and the spacer bottom. In one embodiment, the techniques may be utilized to etch TiO2 spacers formed along amorphous silicon mandrels using an ICP etch tool utilizing a one-step etch process.

Abstract: An actuator is described, including a first sheet comprising a plurality of first openings,; and a second sheet comprising a plurality of second openings; wherein the first and second sheets are stacked together such that at least one of the first and second openings are misaligned; and the actuator is configured to move from a first state to a second state, wherein in the first state, out-of-plane motion of the first and second sheets is permitted; and in the second state, the first and second sheets as well as the misaligned first and second openings are jammed together to restrict the out-of-plane motion of the first and second sheets. Methods of actuating and making such actuator are also described.

Abstract: According to various aspects and embodiments, materials having a modified surface to increase hydrophobicity and methods of making the same are disclosed. In accordance with one or more aspects, a method of enhancing a surface of a substrate may comprise bonding silane monomers onto the surface of the substrate, and polymerizing the silane monomers to form surface-attached hydrophobic particles comprising silane polymers.

Abstract: According to various aspects and embodiments, materials having a modified surface to increase hydrophobicity and methods of making the same are disclosed. In accordance with one or more aspects, a method of enhancing a surface of a substrate may comprise bonding silane monomers onto the surface of the substrate, and polymerizing the silane monomers to form surface-attached hydrophobic particles comprising silane polymers.