Abstract: A method for making an FET comprising as many as three parallel channels having different threshold voltages. The two outer channels can have very low W/L ratios and resulting low drain-to-source currents. In one embodiment, the FET has a central enhancement channel flanked by low W/L ratio, low current, depletion channels. This FET is fabricated by (1) forming on the field oxide a photoresist mask having a relatively narrow aperture; (2) overetching the field oxide beneath the photoresist mask aperture to form a relatively wide aperture in the field oxide, leaving a photoresist overhang; (3) implanting the substrate through the relatively narrow photoresist mask aperture to provide an enhancement section of the channel region; (4) removing the photoresist mask; and (5) depletion implanting the substrate through the relatively wide field oxide aperture. The gate structure is formed over the combined enhancement and depletion channels and a source and a drain span the ends of the channels.