Abstract: A micro pressure sensor includes a body having a compartmentalized chamber provided by membranes anchored between opposing walls of the body and carrying electrodes disposed on surfaces of the membranes.

Abstract: Disclosed is a bi-directional exhalation valve useful for many applications such as in CPAP devices. The exhalation valve includes a valve body having a center chamber, side chambers, and bidirectional ports coupled to the center chamber via passages and a mechanism that provides fluid ingress into the bi-directional valve in a first mode of operation or fluid egress from the bi-directional valve in a second mode of operation. Unidirectional ports are coupled to the plurality of bidirectional ports to provide providing fluid egress from the valve in the second mode of operation, and a unidirectional port provides fluid ingress into the bi-directional valve in the first mode of operation. A mechanism including a center paddle, side paddles, and a shaft are arranged in an elongated compartment of the valve body, such that the shaft is pivots and the central and side paddles open and close corresponding ones of the input and output ports.

Abstract: Discloses is a micro-pump that includes a pump body having a compartmentalized pump chamber, with plural inlet and outlet ports and a plurality of membranes disposed in the pump chamber to provide compartments. The membranes are anchored between opposing walls of the pump body and carry electrodes disposed on opposing surfaces of the membranes and walls of the pump body. Also discloses are applications of the micro-pump including as a heat remover and a self-contained continuous positive airway pressure breathing device.

Abstract: A micro pressure sensor includes a body having a compartmentalized chamber provided by membranes anchored between opposing walls of the body and carrying electrodes disposed on surfaces of the membranes.

Abstract: A method of manufacturing a flow measuring device having a rotatable element includes patterning an adhesive layer disposed on a first surface of a first sheet of a flexible material to remove portions of the adhesive layer in an area to define a location for a rotatable element, patterning the first sheet to define the rotatable element in the first sheet, adhering a pair of membrane layers of a second flexible material, to opposing surfaces of the patterned first sheet, with each of the pair of membrane layers having an electrically conductive layer on a surface thereof, patterning the electrically conductive layer to provide an electrode on each of the pair of membrane layers, and adhering a pair of sealing layers to surfaces of the pair of membrane layers.

Abstract: Disclosed is a bi-directional exhalation valve useful for many applications such as in CPAP devices. The exhalation valve includes a valve body having a center chamber, side chambers, and bidirectional ports coupled to the center chamber via passages and a mechanism that provides fluid ingress into the bi-directional valve in a first mode of operation or fluid egress from the bi-directional valve in a second mode of operation. Unidirectional ports are coupled to the plurality of bidirectional ports to provide providing fluid egress from the valve in the second mode of operation, and a unidirectional port provides fluid ingress into the bi-directional valve in the first mode of operation. A mechanism including a center paddle, side paddles, and a shaft are arranged in an elongated compartment of the valve body, such that the shaft is pivots and the central and side paddles open and close corresponding ones of the input and output ports.

Abstract: Disclosed are techniques such as roll to roll processing to produce membrane valves in microelectromechanical systems that are integrated with micro-pumps that include a pump body having compartmentalized pump chambers. One application of this technology is as a valve assembly for a gas concentrator that includes a first micro pump for feeding an input gas stream, a second micro pump to supplying a vacuum and at least one sieve bed having a zeolite. The gas concentrator uses the valve assembly for controlling entry of gas from the first micro pump into the sieve bed and the second micro pump to vent.

Abstract: Disclosed is a valve-less micro pump configuration that includes plural micro pump elements, each including a pump body having a compartmentalized pump chamber, with plural unobstructed inlet ports and outlet ports and a plurality of membranes disposed in the pump chamber to provide compartments. The membranes are anchored between opposing walls of the pump body and carry electrodes disposed on opposing surfaces of the membranes and walls of the pump body.

Abstract: Among other things, a gas storage system includes a group of capsules and an activation element coupled to the group. The group of capsules are formed within a substrate and contain gas stored at a relatively high pressure compared to atmospheric pressure. The activation element is configured to deliver energy in an amount sufficient to cause at least one of the capsules to release stored gas.

Abstract: Described is a micro-haptic actuator device that can be fabricated with roll-to-roll MEMS processing techniques. The device includes a first body having a first surface and a second, opposing surface, the body has a chamber defined by at least one interior wall, a piston member disposed in the chamber, physically spaced from the at least one interior wall of the chamber, the piston member having a first surface and a second opposing surface. A membrane layer is disposed over and attached to the first surface of the body, with a portion of the membrane attached to the first surface of the piston member. The device also includes a first electrode supported on a second surface the membrane, and a second body that supports a second electrode, with the second body attached to the second surface of the first body.

Abstract: Disclosed is a valve-less micro pump configuration that includes plural micro pump elements, each including a pump body having a compartmentalized pump chamber, with plural unobstructed inlet ports and outlet ports and a plurality of membranes disposed in the pump chamber to provide compartments. The membranes are anchored between opposing walls of the pump body and carry electrodes disposed on opposing surfaces of the membranes and walls of the pump body.

Abstract: Described is a micro-haptic actuator device that can be fabricated with roll-to-roll MEMS processing techniques. The device includes a first body having a first surface and a second, opposing surface, the body has a chamber defined by at least one interior wall, a piston member disposed in the chamber, physically spaced from the at least one interior wall of the chamber, the piston member having a first surface and a second opposing surface. A membrane layer is disposed over and attached to the first surface of the body, with a portion of the membrane attached to the first surface of the piston member. The device also includes a first electrode supported on a second surface the membrane, and a second body that supports a second electrode, with the second body attached to the second surface of the first body.

Abstract: Roll to roll processing techniques are described to produce microelectromechanical systems having releasable and movable mechanical structures. A micro-pump that includes a pump body having compartmentalized pump chambers, with plural inlet and outlet ports and valves and plural membranes enclosing the pump chambers is described as a representative example.

Abstract: Among other things, a device for use in electrolyzing water is described. The device comprises an electrolysis unit that includes a chamber, an ion exchange structure in the chamber, a cathode, an anode, a high pressure chamber, and a reservoir. The chamber is separated by the ion exchange structure into a first compartment and a second compartment. The cathode is in the first compartment and the anode in the second compartment. The reservoir is disposed in the high pressure chamber for storing water to be supplied to the chamber of the electrolysis unit. In some implementations, the ion exchange structure is a proton exchange membrane.

Abstract: Disclosed is a micro flow device including a body frame defining a chamber and having a first port and a second port into the chamber. A first membrane carrying a first electrode is disposed over a first face of the body frame and a second membrane carrying a second electrode is disposed over a second face of the body frame. An axle member is disposed in the chamber affixed to the first and second membrane and a wheel member is disposed in the chamber about the axle member and spaced from the axle element by a gap. An interrupter feature is formed on the wheel, with the interrupter feature causing a variation in capacitance between the first and second electrodes during rotation of the wheel. Also disclosed are techniques for providing freely rotating, sliding, moving, etc. features in devices fabricated by roll to roll processes.

Abstract: Disclosed is a micro flow device including a body frame defining a chamber and having a first port and a second port into the chamber. A first membrane carrying a first electrode is disposed over a first face of the body frame and a second membrane carrying a second electrode is disposed over a second face of the body frame. An axle member is disposed in the chamber affixed to the first and second membrane and a wheel member is disposed in the chamber about the axle member and spaced from the axle element by a gap. An interrupter feature is formed on the wheel, with the interrupter feature causing a variation in capacitance between the first and second electrodes during rotation of the wheel. Also disclosed are techniques for providing freely rotating, sliding, moving, etc. features in devices fabricated by roll to roll processes.

Abstract: Described is a micro-haptic actuator device that can be fabricated with roll-to-roll MEMS processing techniques. The device includes a first body having a first surface and a second, opposing surface, the body has a chamber defined by at least one interior wall, a piston member disposed in the chamber, physically spaced from the at least one interior wall of the chamber, the piston member having a first surface and a second opposing surface. A membrane layer is disposed over and attached to the first surface of the body, with a portion of the membrane attached to the first surface of the piston member. The device also includes a first electrode supported on a second surface the membrane, and a second body that supports a second electrode, with the second body attached to the second surface of the first body.

Abstract: Among other things, a device for use in electrolyzing water is described. The device comprises an electrolysis unit that includes a chamber, an ion exchange structure in the chamber, a cathode, an anode, a high pressure chamber, and a reservoir. The chamber is separated by the ion exchange structure into a first compartment and a second compartment. The cathode is in the first compartment and the anode in the second compartment. The reservoir is disposed in the high pressure chamber for storing water to be supplied to the chamber of the electrolysis unit. In some implementations, the ion exchange structure is a proton exchange membrane.

Abstract: Discloses is a micro-pump that includes a pump body having a compartmentalized pump chamber, with plural inlet and outlet ports and a plurality of membranes disposed in the pump chamber to provide compartments. The membranes are anchored between opposing walls of the pump body and carry electrodes disposed on opposing surfaces of the membranes and walls of the pump body. Also discloses are applications of the micro-pump including as a heat remover and a self-contained continuous positive airway pressure breathing device.

Abstract: Roll to roll processing techniques are described to produce microelectromechanical systems having releasable and movable mechanical structures. A micro-pump that includes a pump body having compartmentalized pump chambers, with plural inlet and outlet ports and valves and plural membranes enclosing the pump chambers is described as a representative example.