Abstract: Method for producing CATS include files for photomask production. A table of algorithms identifies each level of the design to be used in a given photomask layer. A key word table is created to identify special functions that must be performed on the data to define changes to be made to polygons in the pattern data of the mask. Compensations for dimensions of the polygons are applied to one or more data levels of the design data based on the specific process and vendor tools to be used to make the photomask. Optimal mathematical steps are derived from the algorithms and include any respective dimensional compensations which are needed to create the polygons of the mask. Each of the mathematical steps are broken into one or more substeps which are executed to create the pattern data. The executable substeps enhance parallel computation for creating the pattern data.