Abstract: The invention relates to an apparatus and a method for the coating of hollow bodies, in particular for the internal coating of plastic drinks bottles by means of a PICVD. It is an object of the invention to ensure a flexible process sequence, a high throughput, an improved supply of fluid and a high-quality coating. The invention in particular proposes a rotary apparatus which comprises a treatment device with double reactors for receiving in each case at least one workpiece, a fluid supply apparatus and at least one fluid control device, which can be used to control the supply of fluid to the treatment device. It is preferable for the vacuum pumps to be arranged on the rotor such that they rotate therewith.

Abstract: An apparatus and a method for the coating of hollow bodies, in particular for the internal coating of plastic drinks bottles by means of a PICVD is provided. The method ensures a flexible process sequence, a high throughput, an improved supply of fluid and a high-quality coating. The rotary apparatus includes a treatment device with double reactors for receiving in each case at least one workpiece, a fluid supply apparatus and at least one fluid control device, which can be used to control the supply of fluid to the treatment device. It is preferable for the vacuum pumps to be arranged on the rotor such that they rotate therewith.

Abstract: An apparatus and method for a vacuum coating of substrates is provided. The apparatus for vacuum coating of substrates includes a conveyor device, at least one coating station having a plurality of coating places, which is conveyed on the conveyor device, an evacuation device, as well as a device for rotating the coating places on the conveyor device.

Abstract: A composite material having a substrate material and at least one barrier coating on one side of the substrate material. The barrier coating is plasma impulse chemical vapor deposited (PICVD) to the substrate material. The barrier coating includes at least one of material selected from the group consisting of SiOx, TiOx, SnOx, Si3Ny, Nb2Oy, and Al2Oy.

Abstract: To enable CVD coating with long coating times in an economical manner, the invention provides a CVD coating device, which comprises a conveyor, at least one coating station for coating workpieces, at least one evacuator and a device that generates a plasma in at least one subregion of the coating station, in which device at least two workpieces can be received in the at least one coating station.

Abstract: To make it easier to move workpieces into and out of reactors in order for them to be treated by CVD therein, the invention provides a device for the CVD treatment of workpieces which comprises a conveyor and at least one reactor secured to the conveyor, the device having at least one mechanical control cam and the reactor having an opening and closing device that is actuated by the at least one control cam.