Patents by Inventor Stephen C. Ahrens

Stephen C. Ahrens has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Self-supported ultra thin silicon wafer process
    Patent number: 6162702
    Abstract: A silicon wafer 2 has an ultra thin central portion 2 that is supported by a circumferential rim 3 of thicker silicon. The central region is thinned by conventional means using conventional removal apparatus. As an alternative method, the central portion is removed using a photoresist mask or a combination of a photoresist mask and a hard mask.
    Type: Grant
    Filed: June 17, 1999
    Date of Patent: December 19, 2000
    Assignee: Intersil Corporation
    Inventors: William R. Morcom, Stephen C. Ahrens, Jeffrey P. Spindler, Raymond T. Ford, Jeffrey E. Lauffer