Abstract: Embodiments of a system, a gas panel and method thereof having reduced exhaust requirements for the delivery of gases include distributing an inert gas in at least one interior portion of the gas panel in which a gas to be delivered by the gas panel is present. Embodiments can further include monitoring for leaks in the interior portion of the gas panel and, in response to a detected leak, increasing the distribution of the inert gas in at least the portion of the gas panel in which the leak was detected. Embodiments may further include exhausting gases out of the gas panel. In such embodiments, in response to a detected leak, a rate of the exhausting of the gases is increased. The gas panel can also be sealed to reduce an amount of gas that leaks out of or air that enters into the gas panel.

Abstract: Gas flow control assemblies configured to deliver a gas to a process chamber. The gas flow control assemblies include a single-piece manifold including a manifold body having a length, a first side, and a second side opposite the first side, and passageways extending through the manifold body, the passageways being open to both of the first side and the second side, and no other passageways are formed on any remaining sides, an inlet conduit, an inlet valve, a filter, and an outlet conduit, coupled to one of the first side and the second side, wherein at least some of the inlet conduit, the inlet valve, the filter, the outlet valve, and the outlet conduit are coupled to the first side, and the others are coupled to the second side. Methods and gas panel assemblies for controlling gas flow to a process chamber are described, as are other aspects.

Abstract: Embodiments of a system, a gas panel and method thereof having reduced exhaust requirements for the delivery of gases include distributing an inert gas in at least one interior portion of the gas panel in which a gas to be delivered by the gas panel is present. Embodiments can further include monitoring for leaks in the interior portion of the gas panel and, in response to a detected leak, increasing the distribution of the inert gas in at least the portion of the gas panel in which the leak was detected. Embodiments may further include exhausting gases out of the gas panel. In such embodiments, in response to a detected leak, a rate of the exhausting of the gases is increased. The gas panel can also be sealed to reduce an amount of gas that leaks out of or air that enters into the gas panel.

Abstract: An apparatus for supporting a substrate in a processing system comprising a body and an upper top portion having a surface thereon adapted to minimize friction and/or chemical reactions between the substrate support and a substrate supported thereon.

Abstract: A method and apparatus for supporting a substrate during a thermal process. In one embodiment, a substrate support is provided having a body and an upper top portion having a surface thereon adapted to minimize friction and/or chemical reactions between the substrate support and a substrate supported thereon.

Abstract: An apparatus for supporting a glass substrate is provided. In one embodiment, a substrate support is provided having a base structural member and an upper top portion having a surface thereon adapted to minimize friction and/or chemical reactions between the substrate support and a glass substrate supported thereon. The substrate supports may be utilized in various chambers such as load locks chamber and chambers having thermal processes.

Abstract: An apparatus for supporting a glass substrate is provided. In one embodiment, a substrate support is provided having a base structural member and an upper top portion having a surface thereon adapted to minimize friction and/or chemical reactions between the substrate support and a glass substrate supported thereon. The substrate supports may be utilized in various chambers such as load locks chamber and chambers having thermal processes.

Abstract: A dye laser is of compact, rigid and simple construction, with a folded resonator cavity contained on a single rigid block of material, such as aluminum. The block has two or three mirror mount locations, at least one of which is a machined surface which receives a mirror directly and rigidly, without provision for adjustment. The other mirror mount location(s) has an adjustable mirror mount, and this may be the mirror mount for the output mirror. A dye jet mounting block has a flat surface which engages against a flat surface on the exterior of the laser block, with fasteners allowing for rotation and translation of the dye jet block on the laser resonator block to provide for both rotational and translational tuning adjustment of the dye jet with respect to the resonator cavity and a pumping beam. The pumping beam preferably is folded by an adjustable pump mirror on its approach to the dye jet.