Patents by Inventor Stephen Cannizzaro

Stephen Cannizzaro has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pumping system for evacuating reactor chambers
    Patent number: 5433238
    Abstract: A system for evacuating a reactor chamber includes a main evacuation line connected at one end thereof to the reactor chamber and at another end thereof to a means for creating a partial vacuum. A valve in the main evacuation line divides the line into a chamber side and a vacuum side. A second line is connected at one end to the vacuum side of the main evacuation line and at another end to a fluid supply source. As the valve in the main evacuation line is opened, fluid is supplied through the second line to the main evacuation line to prevent rapid, turbulence-inducing pressure drops in the reactor chamber.
    Type: Grant
    Filed: September 6, 1994
    Date of Patent: July 18, 1995
    Assignee: VLSI Technology, Inc.
    Inventors: Stephen Cannizzaro, John Cain, Miguel Delgado, Ramiro Solis