Abstract: Cleanroom particle capture systems and cleanroom workstations include a duct carrying a particle capture air stream. A fan and a particle filter are arranged at the first end of the duct with at least some of the particle capture air stream passing through the filter, wherein the particle capture airstream has a first air velocity at the filter. A blow off device provides a blow off airstream into the duct at a second end of the duct, with the blow off airstream having a second air velocity at the second end that is higher than the first air velocity. The duct has one or more intervening features to reduce the second air velocity such that it substantially matches the first air velocity when the blow off airstream reaches the filter.

Abstract: Cleanroom particle capture systems and cleanroom workstations utilizing the particle capture systems are disclosed. One embodiment of a particle capture system according to the present invention comprises a duct carrying a particle capture air stream. A fan is included at a first end of said duct that generates the particle capture air stream. A particle filter is also arranged at the first end of the duct with at least some of the particle capture air stream passing through the filter, wherein the particle capture airstream has a first air velocity at said filter. A blow off device provides a blow off airstream into the duct at a second end of the duct, with the blow off airstream having a second air velocity at the second end that is higher than the first air velocity. The duct has one or more intervening features to reduce the second air velocity such that it substantially matches the first air velocity when the blow off airstream reaches the filter.