Patents by Inventor Stephen Charles Garner

Stephen Charles Garner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Interchangeable sputter gun head
    Patent number: 9318306
    Abstract: In some embodiments, apparatus are provided that provide for flexible processing in both high productivity combinatorial (HPC) and full wafer modes. The apparatus allow for interchangeable functionality that includes deposition with different sizes of targets, plasma treatment, ion beam treatment, and in-situ metrology. The functional modules are designed so that the modules may be interchanged with minimal effort and reduced system downtime.
    Type: Grant
    Filed: December 20, 2013
    Date of Patent: April 19, 2016
    Assignee: Intermolecular, Inc.
    Inventors: Owen Fong, Timothy Franklin, Stephen Charles Garner, James Tsung
  • Interchangeable Sputter Gun Head
    Publication number: 20150176117
    Abstract: In some embodiments, apparatus are provided that provide for flexible processing in both high productivity combinatorial (HPC) and full wafer modes. The apparatus allow for interchangeable functionality that includes deposition with different sizes of targets, plasma treatment, ion beam treatment, and in-situ metrology. The functional modules are designed so that the modules may be interchanged with minimal effort and reduced system downtime.
    Type: Application
    Filed: December 20, 2013
    Publication date: June 25, 2015
    Applicant: Intermolecular, Inc.
    Inventors: Owen Fong, Timothy Franklin, Stephen Charles Garner, James Tsung