Patents by Inventor Stephen Craig Bigley

Stephen Craig Bigley has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Trap for capturing waste by-product generated by a chemical vapor deposition system
    Patent number: 6063197
    Abstract: A chemical vapor deposition system including a chemical vapor deposition chamber, an inlet line for directing reactant gases into the deposition chamber, and outlet line for discharging waste by-product from the deposition chamber, and a detachable trap position along the outlet line for trapping at least a portion of the waste by-product. The trap can include an array of baffles for increasing the surface area within the trap and disrupting flow within the trap. The trap can also include cooling structure for cooling at least a portion of the trap to enhance waste by-product deposition within the trap.
    Type: Grant
    Filed: September 29, 1997
    Date of Patent: May 16, 2000
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Arthur Leo Cox, Stephen Craig Bigley