Patents by Inventor Stephen D. Dasso

Stephen D. Dasso has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cycle purging a vacuum chamber during bakeout process
    Patent number: 5879467
    Abstract: A vacuum system bakeout process is performed by cycling the system between two pressures, pumping the system down to a lower pressure, and holding the system at that lower pressure for a period of time. A gas, such as argon gas, is introduced into the system. This gas introduction is done while cycling between the two pressures. The pump is used to lower the pressure during cycling, and the gas flow is used to raise the pressure. A rough pump performs the cycling between pressures, and then a high vacuum pump evacuates the system to the lower pressure.
    Type: Grant
    Filed: September 2, 1997
    Date of Patent: March 9, 1999
    Assignee: Applied Materials, Inc.
    Inventors: Jiaxiang Zhou, Stephen D. Dasso