Patents by Inventor Stephen D. Loeffler

Stephen D. Loeffler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Close-coupled purgeable vaporizer valve
    Patent number: 8122903
    Abstract: A method and system are provided for an integrated fluid and vapor delivery system design that optimizes vapor delivery. The method and system utilize a purgeable valve assembly which is closely coupled to a vaporizer. The purgeable valve assembly includes a liquid control valve and a purge gas valve which are connected by an outlet to the vaporizer in a manner minimizing the dead volume of the liquid supplied to the vaporizer. The system does not require the liquid precursor to be subjected to vacuum prior to entry into the vaporizer.
    Type: Grant
    Filed: May 13, 2008
    Date of Patent: February 28, 2012
    Assignee: Parker-Hannifin Corporation
    Inventors: Stephen D. Loeffler, Seth B. Wolf, Charles W. Albrecht
  • CLOSE-COUPLED PURGEABLE VAPORIZER VALVE
    Publication number: 20090025796
    Abstract: A method and system are provided for an integrated fluid and vapor delivery system design that optimizes vapor delivery. The method and system utilize a purgeable valve assembly which is closely coupled to a vaporizer. The purgeable valve assembly includes a liquid control valve and a purge gas valve which are connected by an outlet to the vaporizer in a manner minimizing the dead volume of the liquid supplied to the vaporizer. The system does not require the liquid precursor to be subjected to vacuum prior to entry into the vaporizer.
    Type: Application
    Filed: May 13, 2008
    Publication date: January 29, 2009
    Inventors: Stephen D. Loeffler, Seth B. Wolf, Charles W. Albrecht
  • RIGHT-SIZED VACUUM PRECURSOR (RSVP) DISTILLATION SYSTEM
    Publication number: 20080044572
    Abstract: A method for purifying a precursor material for use in a chemical vapor deposition system comprising providing a precursor material suitable for chemical vapor deposition, and distilling the precursor material to provide, as a distillate, a purified precursor material from which at least one non-volatile component, at least one metal impurity, or a combination thereof has been removed. The method may be used to purify siloxane and silane precursor materials and reduce clogging of chemical vapor deposition components.
    Type: Application
    Filed: August 15, 2007
    Publication date: February 21, 2008
    Inventors: Stephen D. Loeffler, Seth B. Wolf, Charles W. Albrecht, John J. Brennan
  • Nasal mask
    Patent number: D777905
    Type: Grant
    Filed: April 21, 2015
    Date of Patent: January 31, 2017
    Assignee: Parker-Hannifin Corporation
    Inventors: Seth B. Wolf, Stephen D. Loeffler, Robert F. Guyette
  • Nasal mask
    Patent number: D790055
    Type: Grant
    Filed: December 9, 2016
    Date of Patent: June 20, 2017
    Assignee: Parker-Hannifin Corporation
    Inventors: Seth B. Wolf, Stephen D. Loeffler, Robert F. Guyette