Abstract: A multi-layer interconnect structure of alternating dielectric (e.g., polyimide) and metal (e.g., copper) is built on a substrate supporting a continuous layer of metal. This metal layer is used as an electrode for plating vias through all the dielectric layers. Once the desired number of layers are formed, the substrate is removed and the continuous metal layer is patterned. Solid metal vias having nearly vertical side walls can be stacked vertically, producing good electrical and thermal transfer paths and permitting small, closely-spaced conductors. Further, by mixing geometrical shapes of conductors, a variety of useful structures can be achieved, such as controlled impedance transmission lines and multiconductor TAB tape with interconnects on tape of different dimensions than TAB fingers.

Abstract: A micromachined diaphragm is positioned across a gap from an end of an optic fiber. The optic fiber and the diaphragm are integrally mounted. The end of the optic fiber provides a local reference plane which splits light carried through the fiber toward the diaphragm. The light is split into a transmitted part which is subsequently reflected from the diaphragm, and a locally reflected part which interferes with the subsequently diaphragm reflected part. The interference of the two reflective parts forms an interference light pattern carried back through the fiber to a light detector. The interference pattern provides an indication of diaphragm deflection as a function of applied pressure across the exposed side of the diaphragm. A detection of magnitude and direction of diaphragm deflection is provided by use of a second fiber positioned across the gap from the diaphragm. The second fiber provides an interference pattern in the same manner as the first fiber but with a phase shift.

Abstract: An electrostatically driven microactuator is micromachined in a monolithic process. Sacrificial layers are placed between a moving element and stator structural layers. Removal of the sacrificial layers leaves a free standing moving element and micron wide air gaps within a stator. An electric field of about 100 Mv/m and higher is supported across the micron wide gap without breakdown and enables high energy torque densities to be produced between the stator and the moving element. One electrostatic drive scheme involves a series of stator electrodes attached to the stator and a series of electrodes attached to the moving element charged in sequence to attract each other in a direction of movement and to oppose each other in a direction normal to movement. A bearing is aligned with the moving element with the stator during the layering of a sacrificial layer over an edge of the moving element structural layer. The bearing and stator laterally stabilize the moving element.

Abstract: A thin diaphragm receives pressure across one side and faces a beam splitter on the other side. The beam splitter is integrally attached to the diaphragm and serves as a local optical reference plane for the entire assembly. Coherent light from a light source is partially reflected at the beam splitter. The remainder of the light is reflected from the diaphragm. The reflected beams recombine at a detection point and have a phase difference which is a function of the amount of deflection of the diaphragm. The detected recombined beams are indicative of the deflection of the diaphragm. Optical calibration of the aseembly is a function of the distance between the diaphragm and beam splitter which remains as predefined because the beam splitter is integral with the diaphragm. A vent in the small cavity formed between the diaphragm and beam splitter enables the diaphragm to sense small pressures with increased sensitivity.

Abstract: A force sensor detects adhesion between a subject and a substrate through an adhesive. The sensor is embedded in the adhesive and is formed by two members which are displaceable relative to each other. A readout scheme detects displacement of the two members due to a force and reaction forces acting upon the sensor through the adhesive. Fiber optics may be employed in the readout scheme to provide an indication of displacement of the two members and thereby adhesion of the subject to the substrate.

Abstract: A device for quantitatively measuring adherence of thin films provides a first substrate having an upper surface and a second substrate having a surface coplanar therewith. The second substrate is spaced on all sides from the first substrate by a cavity. The thin film is suspended over the cavity and adhered to the surfaces of the two substrates. A characteristic length of the area of the surface of the second substrate to which the film is adhered is made small relative to the characteristic length of the cavity. A pressure differential is applied across the thickness of the film such that the film debonds from the surface of the second substrate. Mechanical characteristics of the debonding of the film are observed and measured. The characteristics are thereafter related to provide a quantitative measurement of adherence of the thin film to the second substrate. A measurement of relative adherence between different films is obtained by testing a multilayered film structure.

Abstract: A microbridge is used for the accurate measuring of time varying shear forces in the presence of fluctuating pressure. A microdimensioned plate is suspended by arms to form a microbridge. The microdimensions enable the smallest turbulence scales of interest to be sensed uniformally throughout the entire surface of the plate. The cavity beneath the microbridge is so small that a viscous drag is created in the air within the cavity and dampens normal movement of the plate. The microdimensions in conjunction with the damping effect of the cavity enable the sensor to be substantially insensitive to pressure and thus sense lateral forces independent of normal forces. The microbridge sensor is fabricated by surface micromachining. A sacrificial layer is deposited over a substrate. A structural layer is deposited and patterned to form the plate and support arms over the sacrificial layer.

Abstract: Released film structures are employed in measuring the mechanical properties of the film material. By measuring the deformation of thin film structures held under intrinsic tensile stress and then released, these mechanical properties can be accurately measured.

Abstract: A microminiature resonant hollow beam sensor is manufactured by micromachining and microfabrication techniques. Specifically, a sensor is formed by etching troughs in a pair of silicon substrates, joining the substrates face-to-face, and etching away unwanted material to free the resonant hollow beam sensors.

Abstract: An impedance measuring apparatus having a measuring transistor with its gate electrode adapted to form a two electrode, interdigitated capacitor with the material to be measured forming the dielectric, a second reference transistor connected in differential configuration to the measuring transistor so that their drain currents are constrained to be equal, a time-varying voltage generator connected to one electrode of the interdigitated capacitor and a gain-phase meter connected to the gate of the reference transistor.

Abstract: Logic elements such as inverters, NAND-gates and NOR-gates that include charge-flow transistors and systems that include such logic elements, and oscillators that include such logic elements. A basic logic element includes a charge-flow transistor and a load element, in combination, the load element being connected to either the source or the drain of the charge-flow transistor.

Abstract: A method for determining the moisture content of dielectric materials is described wherein a sample of the material is placed between two electrodes and an electric field is applied. An alternating frequency in the range of radio waves and lower is applied to the electrodes and the dielectric loss properties of the material are determined. The dielectric loss properties are then used to determine moisture content. In an alternate embodiment, a step voltage is applied to the electrodes and the direct current is monitored. The decrease in value of direct current during a time interval following the application of the step voltage is used to determine the moisture content.

Abstract: An oscillator having a logic element that includes a charge-flow transistor and a load element, in combination, and that further includes a Schmitt trigger or the like connected to receive as input thereto an output from the logic element and to provide an output that is fed back as input to the logic element.

Abstract: A charge-flow transistor having a source region and a drain region in a semiconductor substrate, a gate insulator and a gapped gate electrode with a gap material having some electrical conductance disposed in the gap thereof.

Abstract: Oscillators that include charge-flow transistor logic elements, each logic element including a charge-flow transistor and a load element, in combination. The charge-flow transistors have TURN-ON times t.sub.on and TURN-OFF times t.sub.off that can be very different from one another (e.g., t.sub.on can range from milliseconds to hundreds of seconds; whereas in the charge-flow transistors shown herein t.sub.off is typically less than one microsecond). The magnitude of t.sub.on is sensitive to the environment; hence, the period of oscillation can be used as a measure of an environmental condition.

Abstract: A charge-flow transistor having a source region and a drain region in a semiconductor substrate, a gate insulator, and a gapped gate electrode with a thin-film material having some electrical conductance disposed in the gap thereof. Metallization patterns are provided to reduce the detrimental effect of parasitic currents that appear within the transistor. There is disclosed also a plurality of such transistors in a single die with metallization to reduce any effect of parasitic currents between the transistors of the plurality.

Abstract: A charge-flow transistor having a gapped gate electrode and a thin-film sensor material in the gap, which sensor material is sensitive to a property of the ambient environment and has a surface conductance that differs substantially from the bulk conductance thereof. The charge-flow transistor is shown as part of an instrument operable to measure said property.