Patents by Inventor Stephen Dale Coomer

Stephen Dale Coomer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas distribution apparatus for improved film uniformity in an epitaxial system
    Patent number: 10501866
    Abstract: A gas distribution system is disclosed in order to obtain better film uniformity on a wafer. The better film uniformity may be achieved by utilizing an expansion plenum and a plurality of, for example, proportioning valves to ensure an equalized pressure or flow along each gas line disposed above the wafer.
    Type: Grant
    Filed: January 19, 2017
    Date of Patent: December 10, 2019
    Assignee: ASM IP Holding B.V.
    Inventors: Stephen Dale Coomer, Robert Vyne, Timo Bergman, Lee Bode, Wentao Wang
  • Variable adjustment for precise matching of multiple chamber cavity housings
    Patent number: 10312129
    Abstract: A vertical adjustment assembly is disclosed in order to provide for matching vertical positions of two substrates within separate chambers or cavities of a reaction system for processing of semiconductor substrates. The vertical adjustment assembly, in cooperation with a main lift driver, can provide for a more accurate positioning of the substrates to account for a tolerance stack-up error.
    Type: Grant
    Filed: February 9, 2018
    Date of Patent: June 4, 2019
    Assignee: ASM IP Holding B.V.
    Inventor: Stephen Dale Coomer
  • VARIABLE ADJUSTMENT FOR PRECISE MATCHING OF MULTIPLE CHAMBER CAVITY HOUSINGS
    Publication number: 20180166315
    Abstract: A vertical adjustment assembly is disclosed in order to provide for matching vertical positions of two substrates within separate chambers or cavities of a reaction system for processing of semiconductor substrates. The vertical adjustment assembly, in cooperation with a main lift driver, can provide for a more accurate positioning of the substrates to account for a tolerance stack-up error.
    Type: Application
    Filed: February 9, 2018
    Publication date: June 14, 2018
    Inventor: Stephen Dale Coomer
  • Variable adjustment for precise matching of multiple chamber cavity housings
    Patent number: 9960072
    Abstract: A vertical adjustment assembly is disclosed in order to provide for matching vertical positions of two substrates within separate chambers or cavities of a reaction system for processing of semiconductor substrates. The vertical adjustment assembly, in cooperation with a main lift driver, can provide for a more accurate positioning of the substrates to account for a tolerance stack-up error.
    Type: Grant
    Filed: February 22, 2016
    Date of Patent: May 1, 2018
    Assignee: ASM IP Holding B.V.
    Inventor: Stephen Dale Coomer
  • GAS DISTRIBUTION APPARATUS FOR IMPROVED FILM UNIFORMITY IN AN EPITAXIAL SYSTEM
    Publication number: 20170260649
    Abstract: A gas distribution system is disclosed in order to obtain better film uniformity on a wafer. The better film uniformity may be achieved by utilizing an expansion plenum and a plurality of, for example, proportioning valves to ensure an equalized pressure or flow along each gas line disposed above the wafer.
    Type: Application
    Filed: January 19, 2017
    Publication date: September 14, 2017
    Inventors: Stephen Dale Coomer, Robert Vyne, Timo Bergman, Lee Bode, Wentao Wang
  • VARIABLE ADJUSTMENT FOR PRECISE MATCHING OF MULTIPLE CHAMBER CAVITY HOUSINGS
    Publication number: 20170092531
    Abstract: A vertical adjustment assembly is disclosed in order to provide for matching vertical positions of two substrates within separate chambers or cavities of a reaction system for processing of semiconductor substrates. The vertical adjustment assembly, in cooperation with a main lift driver, can provide for a more accurate positioning of the substrates to account for a tolerance stack-up error.
    Type: Application
    Filed: February 22, 2016
    Publication date: March 30, 2017
    Inventor: Stephen Dale Coomer