Patents by Inventor Stephen David Sharples

Stephen David Sharples has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical measurement apparatus and method
    Patent number: 7616307
    Abstract: An optical modulation spectroscopy system comprises a probe beam source and components for directing the probe beam at a sample. It also may comprise a modulated pump beam source and components for directing a modulated pump beam at the sample. A dispersive system may disperse the reflected probe beam into constituent wavelengths to provide dispersed beams. A detector array may detect multiple dispersed reflected probe beams and processes a signal corresponding to each. Thus, measurement may be multiplexed for very fast performance.
    Type: Grant
    Filed: April 2, 2008
    Date of Patent: November 10, 2009
    Assignee: KLA-Tencor Corporation
    Inventors: Martin Edward Murtagh, Patrick Vincent Kelly, Michael Geoffrey Somekh, Mark Charles Pitter, Stephen David Sharples
  • Optical Measurement Apparatus and Method
    Publication number: 20090033931
    Abstract: An optical modulation spectroscopy system comprises a probe beam source and components for directing the probe beam at a sample. It also may comprise a modulated pump beam source and components for directing a modulated pump beam at the sample. A dispersive system may disperse the reflected probe beam into constituent wavelengths to provide dispersed beams. A detector array may detect multiple dispersed reflected probe beams and processes a signal corresponding to each. Thus, measurement may be multiplexed for very fast performance.
    Type: Application
    Filed: April 2, 2008
    Publication date: February 5, 2009
    Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION
    Inventors: Martin Edward Murtagh, Patrick Vincent Kelly, Michael Geoffrey Somekh, Mark Charles Pitter, Stephen David Sharples