Patents by Inventor Stephen E. Krause

Stephen E. Krause has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8000080
    Abstract: An apparatus and method for trapping particles in a housing is disclosed. A high voltage terminal/structure is situated within a housing. A conductive material, having a plurality of holes, such as a mesh, is disposed a distance away from an interior surface of the housing, such as the floor of the housing, forming a particle trap. The conductive mesh is biased so that the electrical field within the trap is either non-existent or pushing toward the floor, so as to retain particles within the trap. Additionally, a particle mover, such as a fan or mechanical vibration device, can be used to urge particles into the openings in the mesh. Furthermore, a conditioning phase may be used prior to operating the high voltage terminal, whereby a voltage is applied to the conductive mesh so as to attract particles toward the particle trap.
    Type: Grant
    Filed: December 4, 2008
    Date of Patent: August 16, 2011
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Stephen E. Krause, Russell J. Low, Kasegn D. Tekletsadik
  • Publication number: 20110094862
    Abstract: Techniques for making high voltage connections are disclosed. In one particular exemplary embodiment, the techniques may be realized as an electrical switch. The electrical switch may comprise a component extending from a first electrical contact to a second electrical contact. The component may also comprise a non-conductive section and a conductive section. In a first mode of operation, at least a portion of the non-conductive section may be positioned between the two electrical contacts to insulate the two electrical contacts. In a second mode of operation, the conductive section may be positioned between the two electrical contacts to connect the two electrical contacts.
    Type: Application
    Filed: January 3, 2011
    Publication date: April 28, 2011
    Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
    Inventors: Douglas E. MAY, Kasegn D. Tekletsadik, Eric Hermanson, Piotr R. Lubicki, Russell J. Low, Joseph C. Olson, Stephen E. Krause
  • Patent number: 7863531
    Abstract: Techniques for making high voltage connections are disclosed. In one particular exemplary embodiment, the techniques may be realized as an electrical switch. The electrical switch may comprise a component extending from a first electrical contact to a second electrical contact. The component may also comprise a non-conductive section and a conductive section. In a first mode of operation, at least a portion of the non-conductive section may be positioned between the two electrical contacts to insulate the two electrical contacts. In a second mode of operation, the conductive section may be positioned between the two electrical contacts to connect the two electrical contacts.
    Type: Grant
    Filed: September 26, 2007
    Date of Patent: January 4, 2011
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Douglas E. May, Kasegn D. Tekletsadik, Eric Hermanson, Piotr R. Lubicki, Russell J. Low, Joseph C. Olson, Stephen E. Krause
  • Patent number: 7821213
    Abstract: Techniques for controlling a charged particle beam are disclosed. In one particular exemplary embodiment, the techniques may be realized as a charged particle acceleration/deceleration system. The charged particle acceleration/deceleration system may comprise an accelerator column, which may comprise a plurality of electrodes. The plurality of electrodes may have apertures through which a charged particle beam may pass. The charged particle acceleration/deceleration system may also comprise a voltage grading system. The voltage grading system may comprise a first fluid reservoir and a first fluid circuit. The first fluid circuit may have conductive connectors connecting to at least one of the plurality of electrodes. The voltage grading system may further comprise fluid in the first fluid circuit. The fluid may have an electrical resistance.
    Type: Grant
    Filed: October 1, 2007
    Date of Patent: October 26, 2010
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Piotr R. Lubicki, Russell J. Low, Stephen E. Krause, Frank Sinclair
  • Publication number: 20090147435
    Abstract: An apparatus and method for trapping particles in a housing is disclosed. A high voltage terminal/structure is situated within a housing. A conductive material, having a plurality of holes, such as a mesh, is disposed a distance away from an interior surface of the housing, such as the floor of the housing, forming a particle trap. The conductive mesh is biased so that the electrical field within the trap is either non-existent or pushing toward the floor, so as to retain particles within the trap. Additionally, a particle mover, such as a fan or mechanical vibration device, can be used to urge particles into the openings in the mesh. Furthermore, a conditioning phase may be used prior to operating the high voltage terminal, whereby a voltage is applied to the conductive mesh so as to attract particles toward the particle trap.
    Type: Application
    Filed: December 4, 2008
    Publication date: June 11, 2009
    Inventors: Stephen E. Krause, Russell J. Low, Kasegn D. Tekletsadik
  • Publication number: 20090085504
    Abstract: Techniques for controlling a charged particle beam are disclosed. In one particular exemplary embodiment, the techniques may be realized as a charged particle acceleration/deceleration system. The charged particle acceleration/deceleration system may comprise an accelerator column, which may comprise a plurality of electrodes. The plurality of electrodes may have apertures through which a charged particle beam may pass. The charged particle acceleration/deceleration system may also comprise a voltage grading system. The voltage grading system may comprise a first fluid reservoir and a first fluid circuit. The first fluid circuit may have conductive connectors connecting to at least one of the plurality of electrodes. The voltage grading system may further comprise fluid in the first fluid circuit. The fluid may have an electrical resistance.
    Type: Application
    Filed: October 1, 2007
    Publication date: April 2, 2009
    Applicant: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Piotr R. Lubicki, Russell J. Low, Stephen E. Krause, Frank Sinclair
  • Publication number: 20090078554
    Abstract: Techniques for making high voltage connections are disclosed. In one particular exemplary embodiment, the techniques may be realized as an electrical switch. The electrical switch may comprise a component extending from a first electrical contact to a second electrical contact. The component may also comprise a non-conductive section and a conductive section. In a first mode of operation, at least a portion of the non-conductive section may be positioned between the two electrical contacts to insulate the two electrical contacts. In a second mode of operation, the conductive section may be positioned between the two electrical contacts to connect the two electrical contacts.
    Type: Application
    Filed: September 26, 2007
    Publication date: March 26, 2009
    Applicant: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Douglas E. May, Kasegn D. Tekletsadik, Eric Hermanson, Piotr R. Lubicki, Russell J. Low, Joseph C. Olson, Stephen E. Krause
  • Patent number: 7482598
    Abstract: Techniques for preventing parasitic beamlets from affecting ion implantation are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for preventing parasitic beamlets from affecting ion implantation. The apparatus may comprise a controller that is configured to scan a spot beam back and forth, thereby forming an ion beam spanning a predetermined width. The apparatus may also comprise an aperture mechanism that, if kept stationary, allows the spot beam to pass through. The apparatus may further comprise a synchronization mechanism, coupled to the controller and the aperture mechanism, that is configured to cause the aperture mechanism to move in synchronization with the scanned spot beam, allowing the scanned spot beam to pass through but blocking one or more parasitic beamlets associated with the spot beam.
    Type: Grant
    Filed: December 6, 2006
    Date of Patent: January 27, 2009
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Russell J. Low, Jonathan Gerald England, Stephen E. Krause, Eric D. Hermanson
  • Patent number: 7476878
    Abstract: Techniques for reducing effects of photoresist outgassing are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for reducing effects of photoresist outgassing in an ion implanter. The apparatus may comprise a drift tube located between an end-station and an upstream beamline component. The apparatus may also comprise a first variable aperture between the drift tube and the end-station. The apparatus may further comprise a second variable aperture between the drift tube and the upstream beamline component. The first variable aperture and the second variable aperture can be adjusted to facilitate differential pumping.
    Type: Grant
    Filed: December 6, 2006
    Date of Patent: January 13, 2009
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Russell J. Low, Jonathan Gerald England, Stephen E. Krause, Eric D. Hermanson