Patents by Inventor Stephen E. Vargo

Stephen E. Vargo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for membrane protection during reactive ion/plasma etching processing for via or cavity formation in semiconductor manufacture
    Patent number: 8431491
    Abstract: A method for protecting a chuck membrane in a reactive ion etcher during plasma processing is described. The method utilizes a photoresist as a protective layer. Suitable photoresists can be used in this invention to not only image a semiconductor substrate to protect areas where vias and/or cavities are not desired during plasma processing but also to protect the chuck membrane(s) of the reactive ion etcher from being damaged and/or contaminated during plasma processing. Both negative-working and positive-working photoresists can be used.
    Type: Grant
    Filed: October 30, 2009
    Date of Patent: April 30, 2013
    Assignee: E. I. du Pont de Nemours and Company
    Inventors: Chester E. Balut, Frank Leonard Schadt, III, Stephen E. Vargo
  • METHOD FOR MEMBRANE PROTECTION DURING REACTIVE ION/PLASMA ETCHING PROCESSING FOR VIA OR CAVITY FORMATION IN SEMICONDUCTOR MANUFACTURE
    Publication number: 20100112820
    Abstract: A method for protecting a chuck membrane in a reactive ion etcher during plasma processing is described. The method utilizes a photoresist as a protective layer. Suitable photoresists can be used in this invention to not only image a semiconductor substrate to protect areas where vias and/or cavities are not desired during plasma processing but also to protect the chuck membrane(s) of the reactive ion etcher from being damaged and/or contaminated during plasma processing. Both negative-working and positive-working photoresists can be used.
    Type: Application
    Filed: October 30, 2009
    Publication date: May 6, 2010
    Applicant: E.I. DU PONT DE NEMOURS AND COMPANY
    Inventors: CHESTER E. BALUT, Frank Leonard Schadt, III, Stephen E. Vargo
  • Thermal transpiration pump
    Patent number: 6533554
    Abstract: A pump comprises a first thermal guard having holes therethrough for passing a gas, a second thermal guard having holes therethrough for passing the gas, a porous thermal transpiration material disposed between the first thermal guard and the second thermal guard, and a heating mechanism to maintain a temperature difference between the thermal guards across the thermal transpiration material.
    Type: Grant
    Filed: November 1, 2000
    Date of Patent: March 18, 2003
    Assignee: University of Southern California
    Inventors: Stephen E. Vargo, E. Phillip Muntz, Geoff R. Shiflett