Patents by Inventor Stephen Edward Proia

Stephen Edward Proia has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SILICON OR SILICON CARBIDE GAS INJECTOR FOR SUBSTRATE PROCESSING SYSTEMS
    Publication number: 20170167023
    Abstract: A gas injector includes a tubular rod segment that is made of a material selected from a group consisting of silicon and silicon carbide. The tubular rod segment includes a body defining a fluid passageway and threads machined directly on one end thereof. A knuckle includes threads. The threads of the tubular rod segment are connected to the threads of the knuckle. A gas supply tube is connected to the knuckle. One or more additional tubular rod segments can be attached by threads to the tubular rod segment to vary the length of the gas injector.
    Type: Application
    Filed: December 9, 2015
    Publication date: June 15, 2017
    Inventors: Stephen Edward Proia, Jamie Burns, Kevin Herzog, Karl Williams