Patents by Inventor Stephen Fairbanks

Stephen Fairbanks has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for defining and utilizing sub-resolution features in linear topology
    Patent number: 8225239
    Abstract: Regular layout shapes are placed in accordance with a virtual grate. A determination is made as to whether an unoccupied layout space adjacent to a regular layout shape to be reinforced, and extending in a direction perpendicular to the regular layout shape, is large enough to support placement of a sub-resolution shape. Upon determining that the unoccupied layout space is large enough to support placement of the sub-resolution shape, the sub-resolution shape is placed so as to be substantially centered upon a virtual line of the virtual grate within the unoccupied layout space. Also, one or more sub-resolution shapes are placed between and parallel with neighboring regular layout shapes when windows of lithographic reinforcement associated with each of the neighboring regular layout shapes permit. The sub-resolution shapes may be placed according to a virtual grate, or may be placed based on proximity to edges of the neighboring regular layout shapes.
    Type: Grant
    Filed: June 5, 2009
    Date of Patent: July 17, 2012
    Assignee: Tela Innovations, Inc.
    Inventors: Brian Reed, Michael C. Smayling, Joseph N. Hong, Stephen Fairbanks, Scott T. Becker
  • Methods for Defining and Utilizing Sub-Resolution Features in Linear Topology
    Publication number: 20090300574
    Abstract: Regular layout shapes are placed in accordance with a virtual grate. A determination is made as to whether an unoccupied layout space adjacent to a regular layout shape to be reinforced, and extending in a direction perpendicular to the regular layout shape, is large enough to support placement of a sub-resolution shape. Upon determining that the unoccupied layout space is large enough to support placement of the sub-resolution shape, the sub-resolution shape is placed so as to be substantially centered upon a virtual line of the virtual grate within the unoccupied layout space. Also, one or more sub-resolution shapes are placed between and parallel with neighboring regular layout shapes when windows of lithographic reinforcement associated with each of the neighboring regular layout shapes permit. The sub-resolution shapes may be placed according to a virtual grate, or may be placed based on proximity to edges of the neighboring regular layout shapes.
    Type: Application
    Filed: June 5, 2009
    Publication date: December 3, 2009
    Inventors: Brian Reed, Michael C. Smayling, Joseph N. Hong, Stephen Fairbanks