Patents by Inventor Stephen Gary Farrell

Stephen Gary Farrell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210115588
    Abstract: Systems and methods for providing controllable substrate-to-source arrangements in a Molecular Beam Epitaxy (MBE) system to selectively adjust a distance, orientation, or other geometric configuration as between the source(s) and substrate(s) used in epitaxial growth systems are described herein. It has been found that by controllably adjusting height, crucible type and angle, and other processing conditions, that extremely high thickness uniformity can be accomplished in epitaxially grown wafers.
    Type: Application
    Filed: October 19, 2020
    Publication date: April 22, 2021
    Inventors: Richard Charles Bresnahan, Scott Wayne Priddy, William Colbert Campbell, III, Mark Lee O'Steen, Stephen Gary Farrell