Patents by Inventor Stephen Gary Young

Stephen Gary Young has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Scanning wheel for ion implantation process chamber
    Patent number: 6677594
    Abstract: A scan wheel for an ion implanter. The scan wheel having a plurality of wafer support elements each having an elastomer layer 7 on which a wafer is supported. Each wafer support element 3 has a plurality of spring loaded plungers 10 of a material having a lower coefficient of friction than that of the elastomer layer 7 so as to support a wafer such that it can be slid across the wafer support element 3 without sticking to the elastomer layer 7. A position detector 33 can be provided on a gripper which mounts each wafer on a wafer support element to detect that the wafer has been correctly positioned.
    Type: Grant
    Filed: March 10, 2000
    Date of Patent: January 13, 2004
    Assignee: Applied Materials, Inc.
    Inventor: Stephen Gary Young