Patents by Inventor Stephen Gledden

Stephen Gledden has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Full-field optical measurements of surface properties of panels, substrates and wafers
    Patent number: 7369251
    Abstract: Techniques and systems for using optical interferometers to obtain full-field optical measurements of surfaces, such as surfaces of flat panels, patterned surfaces of wafers and substrates. Applications of various shearing interferometers for measuring surfaces are described.
    Type: Grant
    Filed: January 28, 2004
    Date of Patent: May 6, 2008
    Assignee: Ultratech, Inc.
    Inventors: Ares J. Rosakis, David Owen, Stephen Gledden, Sean Olson
  • Optical characterization of surfaces and plates
    Publication number: 20050007601
    Abstract: Techniques and systems for processing optical transmission of a plate in an optical shearing interferometer to measure the plate. Both optical reflection and optical transmission of the plate may be processed by optical shearing interferometers to obtain measurements of the plate, including surface information of at least one reflective surface, the wedge slopes, and variation in the refractive index of the plate, net optical distortions through plate assembly.
    Type: Application
    Filed: January 27, 2004
    Publication date: January 13, 2005
    Inventors: Ares Rosakis, David Owen, Stephen Gledden
  • Full-field optical measurements of surface properties of panels, substrates and wafers
    Publication number: 20040257587
    Abstract: Techniques and systems for using optical interferometers to obtain full-field optical measurements of surfaces, such as surfaces of flat panels, patterned surfaces of wafers and substrates. Applications of various shearing interferometers for measuring surfaces are described.
    Type: Application
    Filed: January 28, 2004
    Publication date: December 23, 2004
    Inventors: Ares J. Rosakis, David Owen, Stephen Gledden, Sean Olson