Patents by Inventor Stephen Golovato

Stephen Golovato has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing pallet with cooling
    Patent number: 9147588
    Abstract: A substrate processing pallet can cool a substrate. A substrate processing pallet can include a base member; an interface pad attachable to the base member, the interface pad having substantially the same coefficient of thermal expansion as the base member and adapted to facilitate cooling of the substrate; and a surface of the base member having features for aligning a substrate on the interface pad. A substrate processing pallet can also include a base member; an interface pad attachable to the base member; an electrostatic chuck for gripping the substrate during processing; an energy storage system for storing energy to sustain the electrostatic chuck at sufficient charge to sustain grip the substrate during processing; and a conduit for transporting gas to a backside of the substrate to facilitate cooling of the substrate.
    Type: Grant
    Filed: March 9, 2007
    Date of Patent: September 29, 2015
    Assignee: TEL NEXX, INC.
    Inventors: Daniel Goodman, Arthur Keigler, Stephen Golovato, David Felsenthal
  • SUBSTRATE PROCESSING PALLET WITH COOLING
    Publication number: 20110024964
    Abstract: In one exemplary embodiment, a substrate processing pallet is provided. The substrate processing pallet includes a base member, and an interface pad attachable to the base member. The interface pad has substantially the same coefficient of thermal expansion as the base member and adapted to facilitate cooling of the substrate. The substrate processing pallet also having a surface of the base member having features for aligning a substrate on the interface pad.
    Type: Application
    Filed: October 8, 2010
    Publication date: February 3, 2011
    Applicant: NEXX SYSTEMS, INC.
    Inventors: Daniel Goodman, Arthur Keigler, Stephen Golovato, David Felsenthal
  • Substrate processing pallet with cooling
    Publication number: 20080220622
    Abstract: A substrate processing pallet can cool a substrate. A substrate processing pallet can include a base member; an interface pad attachable to the base member, the interface pad having substantially the same coefficient of thermal expansion as the base member and adapted to facilitate cooling of the substrate; and a surface of the base member having features for aligning a substrate on the interface pad. A substrate processing pallet can also include a base member; an interface pad attachable to the base member; an electrostatic chuck for gripping the substrate during processing; an energy storage system for storing energy to sustain the electrostatic chuck at sufficient charge to sustain grip the substrate during processing; and a conduit for transporting gas to a backside of the substrate to facilitate cooling of the substrate.
    Type: Application
    Filed: March 9, 2007
    Publication date: September 11, 2008
    Inventors: Daniel Goodman, Arthur Keigler, Stephen Golovato, David Felsenthal