Abstract: Molecular fluorine may be generated and distributed on-site at a fabrication facility. A molecular fluorine generator may come in a variety of sizes to fit better the needs of the particular fabrication facility. The generator may service one process tool, a plurality of process tool along a process bay, the entire fabrication facility, or nearly any other configuration within the facility. The process can obviate the need and inherent risks with transporting or handling gas cylinders. The process can be used in conjunction with a cleaning or fabrication operation used in the electronics fabrication industry.

Abstract: Molecular fluorine may be generated and distributed on-site at a fabrication facility. A molecular fluorine generator may come in a variety of sizes to fit better the needs of the particular fabrication facility. The generator may service one process tool, a plurality of process tool along a process bay, the entire fabrication facility, or nearly any other configuration within the facility. The process can obviate the need and inherent risks with transporting or handling gas cylinders. The process can be used in conjunction with a cleaning or fabrication operation used in the electronics fabrication industry.

Abstract: A system for generating a molecular halogen gas using gas generation modules can provide a flexible platform for scaling to meet increasing demands within a facility. During normal operation, the system may be designed to have one gas generation module in standby mode while the others are in active mode. Adding or removing gas generation cells is relatively straightforward and does not require redesigning the system. The system can be designed with a level of redundancy that best fits the user's needs to allow for continuous uninterruptible operations. The system can be safer to use compared to other systems due to any one or more of electrolytic cell-rectifier pairs, individually exhausted cabinets, organization fluid flow paths and pressures, and the like.

Abstract: A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.

Abstract: Molecular fluorine may be generated and distributed on-site at a fabrication facility. A molecular fluorine generator may come in a variety of sizes to fit better the needs of the particular fabrication facility. The generator may service one process tool, a plurality of process tool along a process bay, the entire fabrication facility, or nearly any other configuration within the facility. The process can obviate the need and inherent risks with transporting or handling gas cylinders. The process can be used in conjunction with a cleaning or fabrication operation used in the electronics fabrication industry.

Abstract: An system and method for on-site generation and distribution of fluorine for semiconductor processes are disclosed. In one aspect, a system for providing fluorine in association with a fabrication process includes a fluorine generator operable to provide fluorine having a concentration and a distributor operable to transfer a volume of fluorine to a selective processing tool. A disclosed method for providing fluorine for a fabrication process includes generating fluorine at a location associated with a process tool and distributing the fluorine to the process tool to be used in association with the fabrication process.

Abstract: A highly reliable bulk chemical delivery system for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.

Abstract: A highly reliable bulk chemical delivery system for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.

Abstract: Containers for ultrahigh purity chemicals having aspect ratios of greater than 3:1 and methods of making the same from seamless electropolished stainless steel tubing are described. Chemical delivery systems for semiconductor fabrication processes that utilize these high aspect ratio containers also are described.

Abstract: A highly reliable bulk chemical delivery system for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.

Abstract: A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.

Abstract: A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.

Abstract: A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.

Abstract: A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.

Abstract: A highly reliable bulk chemical refill system for high purity chemicals is provided. The system employs at least one metallic level sensor in a refillable ampule. The refillable ampule of the present invention comprises a metallic level sensor for sensing a high level or full level in the ampule. The metallic level sensor transmits this signal to a control unit that automatically stops the refilling process. Additionally the refillable ampule includes a low level sensor that either provides an automatic signal for starting the refilling process or an audible or visual alarm to alert an operator that the container is empty and requires refilling. At the same time, the low level sensor sends a signal to the processing equipment indicating the empty state of the ampule.