Abstract: An apparatus, system and method for detecting, identifying, classifying and/or quantifying chemical species in a gas flow using a micro-fabricated ion filter coupled to a system adapted to apply drive signals to the ion filter. Coupled to the ion filter is a system adapted to measure the output of the ion filter, which in turn is coupled to a system adapted to extract numerical parameters from the measured output of the ion filter to facilitate chemical detection, identification, classification and/or quantification of the gas flow.

Abstract: A method for deriving a background-corrected portion of a measured optical emission spectrum comprising the steps of identifying two or more background correction points from the portion of the measured emission spectrum; deriving a background correction function fitted to the identified background correction points, and applying the background correction function to the portion of the measured emission spectrum so as to produce a background-corrected portion of the emission spectrum, wherein the background correction points are identified from the measured data points by consideration of the gradients between the measured data points.

Abstract: An apparatus, system and method for detecting, identifying, classifying and/or quantifying chemical species in a gas flow using a micro-fabricated ion filter coupled to a system adapted to apply drive signals to the ion filter. Coupled to the ion filter is a system adapted to measure the output of the ion filter, which in turn is coupled to a system adapted to extract numerical parameters from the measured output of the ion filter to facilitate chemical detection, identification, classification and/or quantification of the gas flow.

Abstract: An apparatus, system and method for detecting, identifying, classifying and/or quantifying chemical species in a gas flow using a micro-fabricated ion filter coupled to a system adapted to apply drive signals to the ion filter. Coupled to the ion filter is a system adapted to measure the output of the ion filter, which in turn is coupled to a system adapted to extract numerical parameters from the measured output of the ion filter to facilitate chemical detection, identification, classification and/or quantification of the gas flow.

Abstract: A method of and apparatus for controlling the temperature of an inductively coupled or microwave induced plasma for optical emission spectrometry or mass spectrometry in which the intensities of two spectral lines of radiation emitted by the plasma are measured, and the power provided to sustain the plasma is adjusted so that the ratio of the intensities remains substantially constant.

Abstract: An apparatus, system and method for detecting, identifying, classifying and/or quantifying chemical species in a gas flow using a micro-fabricated ion filter coupled to a system adapted to apply drive signals to the ion filter. Coupled to the ion filter is a system adapted to measure the output of the ion filter, which in turn is coupled to a system adapted to extract numerical parameters from the measured output of the ion filter to facilitate chemical detection, identification, classification and/or quantification of the gas flow.