Abstract: The capacity to measure nanoscale features rapidly and accurately is of central importance for the monitoring of manufacturing processes in the production of computer integrated circuits. It is known that far-field scattered light requires a priori sample information in order to reconstruct nanoscale information such as is required in semiconductor metrology. Parameters of interest include, for example, trench depth, duty cycle, wall angle and oxide layer thickness. We describe a scatterometry apparatus and method that uses unconventional polarization states in the pupil of a high NA objective lens, and refer to this as focused beam scatterometry, in which the illumination consists of a focused field with a suitably tailored, spatially-varying polarization distribution. We describe how four or more parameters can be measured and distinguished with an accuracy consistent with the needs laid out in the semiconductor roadmap.

Abstract: The capacity to measure nanoscale features rapidly and accurately is of central importance for the monitoring of manufacturing processes in the production of computer integrated circuits. It is known that far-field scattered light requires a priori sample information in order to reconstruct nanoscale information such as is required in semiconductor metrology. Parameters of interest include, for example, trench depth, duty cycle, wall angle and oxide layer thickness. We describe a scatterometry apparatus and method that uses unconventional polarization states in the pupil of a high NA objective lens, and refer to this as focused beam scatterometry, in which the illumination consists of a focused field with a suitably tailored, spatially-varying polarization distribution. We describe how four or more parameters can be measured and distinguished with an accuracy consistent with the needs laid out in the semiconductor roadmap.

Abstract: Molecules and methods suitable for identifying multiple polymorphic sites in the genome of a plant or animal. The identification of such sites is useful in determining identity, ancestry, predisposition to genetic disease, the presence or absence of a desired trait, etc.

Abstract: A new and distinct cultivar of Rosmarinus named ‘GOLD DUST’ that is characterized by dense upright habit, deep-blue flowers, and thick variegated leaves with dark-green centers and broad gold margins. In combination these traits set ‘GOLD DUST’ apart from all other existing varieties of Rosmarinus known to the inventor.

Abstract: A new and distinct cultivar of Rosmarinus plant named ‘Tuscan Beauty’ that is characterized by dense compact plant habit, foliage which appears to be variegated arising (on closer inspection) as individual leaves that are involute in shape, or longitudinally rolled such that the lighter green abaxial surfaces are rolled or folded over the darker green adaxial surfaces. ‘Tuscan Beauty’ exhibits strongly aromatic foliage which is characteristic of the genus and culinary herb Rosemary and bears pale blue to mid blue bilabiate flowers from spring until late summer. Plants of ‘Tuscan Beauty’ reach 102 cm. in height and 90 cm. in width at maturity but may be maintained as a low-growing juvenile plant if tip-pruned in the first season of growth. ‘Tuscan Beauty’ is hardy to USDA Zone 7. In combination, these traits set ‘Tuscan Beauty’ apart from all other existing varieties of Rosmarinus known to the inventors.

Abstract: A new cultivar of Salvia plant named ‘Celebration’ that is distinguishable by its compact well-branched rounded plant habit and bi-colored foliage of ‘Celebration’ whose leaves are sage-green in color with vibrant golden yellow colored margins. The foliage of ‘Celebration’ is highly aromatic, especially when crushed, and is characteristic of the scent and flavor of the commonly used culinary herb sage. Plants of ‘Celebration’ respond to regular pruning and trimming which stimulates rapid and prolific production of desirable juvenile foliage for culinary use, and averts production of undesirable flower stems. A regularly pruned plant of ‘Celebration’ will fill out and cover the surface of a 1-quart container within 6-8 weeks of transplanting a rooted cutting. A further 4 weeks are required to fill out a 1-gallon container. Plants of ‘Celebration’ are both heat and drought tolerant when grown in containers or in the landscape.