Patents by Inventor Stephen Henry BOND

Stephen Henry BOND has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230273529
    Abstract: Generating a control output for a patterning process is described. A control input is received. The control input is for controlling the patterning process. The control input includes one or more parameters used in the patterning process. The control output is generated with a trained machine learning mod& based on the control input, The machine learning model is trained with training data generated from simulation of the patterning process and/or actual process data, The training data includes 1) a plurality of training control inputs corresponding to a plurality of operational conditions of the patterning process, where the plurality of operational conditions of the patterning process are associated with operational condition specific behavior of the patterning process over time, and 2) training control outputs generated using a physical model based on the training control inputs.
    Type: Application
    Filed: June 14, 2021
    Publication date: August 31, 2023
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Satej Subhash KHEDEKAR, Henricus Jozef CASTELIJNS, Anjan Prasad GANTAPARA, Stephen Henry BOND, Seyed Iman MOSSAVAT, Alexander YPMA, Gerald DICKER, Ewout Klaas STEINMEIER, Chaoqun GUO, Chenxi LIN, Hongwei CHEN, Zhaoze LI, Youping ZHANG, Yi ZOU, Koos VAN BERKEL, Joost Johan BOLDER, Arnaud HUBAUX, Andriy Vasyliovich HLOD, Juan Manuel GONZALEZ HUESCA, Frans Bernard AARDEN