Patents by Inventor Stephen Hyatt

Stephen Hyatt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer tilt detection apparatus and method
    Patent number: 7561258
    Abstract: An exemplary embodiment providing one or more improvements includes a wafer tilt detection apparatus for use with a wafer processing or manufacturing device that applies a process to the wafer and which utilizes an endpoint signal for determining control of the process applied to the wafer. The wafer tilt apparatus uses the endpoint signal in establishing when the wafer was in a tilted orientation during processing.
    Type: Grant
    Filed: May 16, 2007
    Date of Patent: July 14, 2009
    Assignee: Mattson Technology, Inc.
    Inventors: Songlin Xu, Li Hou, Stephen Hyatt
  • Wafer Tilt Detection Apparatus and Method
    Publication number: 20070269910
    Abstract: An exemplary embodiment providing one or more improvements includes a wafer tilt detection apparatus for use with a wafer processing or manufacturing device that applies a process to the wafer and which utilizes an endpoint signal for determining control of the process applied to the wafer. The wafer tilt apparatus uses the endpoint signal in establishing when the wafer was in a tilted orientation during processing.
    Type: Application
    Filed: May 16, 2007
    Publication date: November 22, 2007
    Inventors: Songlin Xu, Li Hou, Stephen Hyatt
  • Farnesoid x receptor agonists
    Publication number: 20060258725
    Abstract: The invention relates to a compound of formula (I): wherein all variables are as defined herein and to pharmaceutical compositions, methods of using, and processes for preparing the same.
    Type: Application
    Filed: November 12, 2003
    Publication date: November 16, 2006
    Inventors: Sharon Boggs, Jon Collins, Stephen Hyatt, Patrick Maloney